A micromachined pressure/flow-sensor

Oosterbroek, R.E.; Lammerink, Theodorus S.J.; Berenschot, J.W.; Krijnen, Gijs; Elwenspoek, Michael Curt; Berg, Albert van den

doi:10.1016/s0924-4247(99)00188-0

Cited by 92 publications

(64 citation statements)

References 10 publications

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“…Early flow-sensor construction attempts included miniaturization of well-established macroflow sensing principles and their application to m-TAS. In most instances, the flow sensors were in physical contact with the media to envisage the flow [141][142][143][144][145]. Others utilized heat transfer flow measurements by gas flow or a TOF-type measurement with a locally initiated temperature pulse [142,143].…”

Section: Flow Measurementmentioning

confidence: 99%

“…Others utilized heat transfer flow measurements by gas flow or a TOF-type measurement with a locally initiated temperature pulse [142,143]. Another type of sensor was based on pressure drop measurement over a well-characterized hydraulic resistance [141]. Two interesting approaches used electrochemical oxygen production as molecular tracer, measured by an oxygen electrode [144]; and employed periodic flapping action of a planar jet impinging on a Vshaped plate [145].…”

Section: Flow Measurementmentioning

confidence: 99%

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New advances in microchip fabrication for electrochromatography

Szekeres

Guttman

2005

Electrophoresis

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There is a great demand in separation technologies for faster and more effective analysis processes. Miniaturization is a suitable technique for satisfying this demand as reduction in size gives increased separation speed with higher efficiency. CEC is an electric-field-mediated separation technique where the liquid flow is generated by the electric field itself. The main advantage of using electric field over pressure for flow generation is the flat flow profile of the EOF; thus, CEC is one of the best candidates to construct a novel and high-efficiency microanalytical device. The aim of the present paper is to review the basic fabrication and bonding principles, as well as connection and system integration options for microfluidics-based electrochromatography. The physical structure and fluidic channel formation are critically evaluated, including glass microstructuring and fusion bonding. Recent developments in nanoflow measurements and the application of various flow control units are also extensively discussed.

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Section: Flow Measurementmentioning

confidence: 99%

Section: Flow Measurementmentioning

confidence: 99%

New advances in microchip fabrication for electrochromatography

Szekeres

Guttman

2005

Electrophoresis

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“…Applied stress alters the local refractive index and length of grating. Two such diaphragms would be needed in order to obtain a fully functional pressure/flow sensor [8]. .…”

Section: Resultsmentioning

confidence: 99%

Flow Monitoring in Optofluidic Channels Using Planar Bragg Gratings

Holmes

Gates

Gawith

et al. 2009

Conference on Lasers and Electro-Optics/International Quantum Electronics Conference

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“…The magnitude of s is such as to prevent the ends of the bar moving along the axis. For a uniformly loaded diaphragm with simply supported edges, the bending moment at any cross section of the strip is given by (6) [17]. 2 2 2…”

Section: Analytical Model For the Deflection Of Soi Diaphragmmentioning

confidence: 99%

“…Most of the piezoresistive pressure sensors use silicon as a diaphragm and piezoresistive property of silicon or polycrystalline silicon to sense the pressure [3][4][5]. A silicon MEMS pressure sensor which changes the capacitance as a sensing mechanism has been widely reported [6][7][8]. The use of a square diaphragm for pressure sensing is preferred because it has better sensitivity than a circular diaphragm [9].…”

Section: Introductionmentioning

confidence: 99%

Computer aided modeling for a miniature silicon-on-insulator MEMS piezoresistive pressure sensor

Komaragiri

2015

Photonic Sens

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Abstract:The silicon-on-insulator diaphragm structure is a combined structure of the silicon dioxide and silicon layer. This work presents a new method to estimate the deflection response of silicon with that of a silicon-on-insulator (SOI) diaphragm structure, based on the burst pressure design approach. It also evaluates the output voltage of the diaphragm under two different conditions, flipped and un-flipped. The new modified analytical model developed and presented in this paper for describing the load deflection of SOI diaphragm is able to predict the deflection accurately when compared with the results obtained by finite element analysis CoventorWare®.Keywords: Micro electro mechanical system (MEMS), finite element analysis (FEA), stacked diaphragm, sensitivity Citation: K.

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A micromachined pressure/flow-sensor

Cited by 92 publications

References 10 publications

New advances in microchip fabrication for electrochromatography

New advances in microchip fabrication for electrochromatography

Flow Monitoring in Optofluidic Channels Using Planar Bragg Gratings

Computer aided modeling for a miniature silicon-on-insulator MEMS piezoresistive pressure sensor

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