Conference on Lasers and Electro-Optics/International Quantum Electronics Conference 2009 Help me understand this report
Flow Monitoring in Optofluidic Channels Using Planar Bragg Gratings
Abstract: An integrated pressure/flow sensor using a direct UV written planar Bragg grating situated inside a flexible diaphragm of thickness 200µm has been fabricated. The diaphragm is created by etching away the underlying silicon support.
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