A micromachined high-Q X-band resonator

Micromachined devices for wireless communications

“…In this case, a reduced height resonant waveguide cavity (with dimensions of λ/2-square) is etched in a silicon wafer and fed either by a slot transition or by bond wires. Since the fields are not confined to planar resonators, these structures have yielded Q's around 500 at 10 GHz, and up to 1,100 at 30 GHz [41,42]. Research is under way to use these miniature waveguide cavities in satellite filters and low-phase noise oscillators.…”

Heterogeneous Wafer-Scale Circuit Architectures

“…Silicon micromachined resonators and filters have already been demonstrated and have shown competitive RF performance [28]- [30]. Even though the attainable Q values were less than those reported for waveguide-based systems, their smaller size and weight make them very appealing for many applications.…”

Microwave cavity resonators using hard X-ray lithography

“…Silicon micromachined resonant-cavity structures were presented for 10-GHz [2], 23-GHz [3], and 30-GHz [4] applications using an anisotropic wet-etching process, which results in nonvertical sidewalls at 54.7°r elative to the horizontal plane and a decrease in the Q factor, as compared to perfect rectangular cavities. The Q factor also increases with cavity depth.…”

“…The synthesis and design method of waveguide pseudo-elliptic waveguide filters presented by Williams and Atia [1,2] are well known, and many other related design techniques have been reported. These conventional filters use coupling schemes which always include direct coupling and cross coupling [see Fig.…”