A Microassembly System for the Flexible Assembly of Hybrid Robotic Mems Devices

Probst, Martin; Hürzeler, Christoph; Borer, Ruedi; Nelson, Bradley J.

doi:10.1080/15599610902894592

Cited by 42 publications

(29 citation statements)

References 20 publications

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“…Two microrobots equipped with piezoelectric actuators operate in the cell, and a 6-axis force/torque sensor is in charge of registering the forces to be filtered, amplified, and finally provided to the human user through the haptic interface. Probst et al (2009) presented a 6-DoF system for the assembly of 3-D bio-microrobotic devices out of individual 2.5-D microelectromechanical systems (MEMS) components. A gripper exchange mechanism allows reaching for parts, and a microfabricated platform provides a structured working area.…”

Section: Atomic Force Microscopymentioning

confidence: 99%

Haptic Feedback for Microrobotics Applications: A Review

et al. 2016

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Microrobotics systems are showing promising results in several applications and scenarios, such as targeted drug delivery and screening, biopsy, environmental control, surgery, and assembly. While most of the systems presented in the literature consider autonomous techniques, there is a growing interest in human-in-the-loop approaches. For reasons of responsibility, safety, and public acceptance, it is in fact beneficial to provide a human with intuitive and effective means for directly controlling these microrobotic systems. In this respect, haptic feedback is widely believed to be a valuable tool in human-in-the-loop teleoperation systems. This article presents a review of the literature on haptic feedback systems for microrobotics, categorizing it according to the type of haptic technology employed. In particular, we considered both tethered and untethered systems, including applications of micropositioning, microassembly, minimally invasive surgery, delivery of objects, micromanipulation, and injection of cells. One of the main challenges for an effective implementation is stability control. In fact, the high scaling factors introduced to match variables in the macro and the micro worlds may introduce instabilities. Another challenge lies in the measurement of position and force signals in the remote environment. The integration of microsized sensors may significantly increase the complexity and cost of tools fabrication. To overcome the lack of force-sensing, vision seems a promising solution. Finally, although the literature on haptic feedback for untethered microrobotics is still quite small, we foreseen a great development of this field of research, thanks to its flexible applications in biomedical engineering scenarios.

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Section: Atomic Force Microscopymentioning

confidence: 99%

Haptic Feedback for Microrobotics Applications: A Review

et al. 2016

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“…In [29,30], the use of a VR-based environment to control and accomplish complex micro-assembly tasks is elaborated. The general approach of using a VR-based interface is discussed in Probst [29] to assemble bio-micro-robots and in Probst [30] to elaborate on the assembly of hybrid MEMS devices.…”

Section: Use Of Vr-based Techniques In Micro-devices Assemblymentioning

confidence: 99%

“…The general approach of using a VR-based interface is discussed in Probst [29] to assemble bio-micro-robots and in Probst [30] to elaborate on the assembly of hybrid MEMS devices. The assembly system includes micro-grippers, cameras, and a dome-shaped illumination system.…”

Section: Use Of Vr-based Techniques In Micro-devices Assemblymentioning

confidence: 99%

A review of micro-devices assembly techniques and technology

Cecil

Kumar

Lü

et al. 2015

Int J Adv Manuf Technol

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This paper provides a review of techniques and technology relevant to the field of micro-devices assembly (MDA). MDA is an emerging domain of importance which is expected to have a substantial impact on a range of industrial fields including sensors, surveillance devices, and semiconductor devices. This paper provides a review of a cross-section of research including micro-gripping design and manipulation techniques, work cell design and factory automation, selfassembly techniques, and virtual reality-based approaches in micro-assembly. A discussion of the key challenges for this domain along with directions for future research is also provided.

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“…The consequence of this strong demand is the emergence of an active research area concerning the development of assembly technologies on a microscale. A review of this research area had been carried out by (Cohn et al, 1998) and (Probst et al, 2009). …”

Section: Motivationsmentioning

confidence: 99%

“…Indeed, high resolution images lead to precise measurements but very small field-of-view, like low resolution images enable large field-ofview but less precise information (Ralis et al, 2000), (Tao et al, 2005). To overcome this duality, two kinds of solutions had been implemented: a switch between the components of a multiple view system (Yang et al, 2003), (Popa and Stephanou, 2004), (Sun and Chin, 2004), (Abbott et al, 2007), (Probst et al, 2009), or integration of a dynamic zoom control in the visual control (Tao et al, 2005), (Tamadazte et al, 2008b). The other advantage of using a distributed vision system is the ability to have access to the depth of the scene using lateral views (Yang et al, 2005).…”

Section: Previous Research In Mems Assemblymentioning

confidence: 99%

CAD Model-based Tracking and 3D Visual-based Control for MEMS Microassembly

Tamadazte

Marchand

Dembélé

et al. 2010

The International Journal of Robotics Research

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This paper investigates sequential robotic microassembly for the construction of 3D micro-electro-mechanical systems (MEMS) structures using a 3D visual servoing approach. The previous solutions proposed in the literature for these kinds of problems are based on 2D visual control because of the lack of precise and robust 3D measures from the work scene. In this paper, the relevance of the real-time 3D visual tracking method and the 3D vision-based control law proposed is demonstrated. The 3D poses of the MEMS are supplied in real-time by a computer-aided design (CAD) model-based tracking algorithm. This latter is sufficiently accurate and robust to enable a precise regulation toward zero of the 3D error using the proposed pose-based visual servoing approach.Experiments on a microrobotic setup have been carried out to achieve assemblies of two or more 400 µm × 400 µm × 100 µm silicon micro-objects by their respective 97 µm × 97 µm × 100 µm notches with an assembly clearance from 1 µm to 5 µm. The different microassembly processes are performed with a mean error of 0.3 µm in position and 0.35×10 −2 rad in orientation.

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A Microassembly System for the Flexible Assembly of Hybrid Robotic Mems Devices

Cited by 42 publications

References 20 publications

Haptic Feedback for Microrobotics Applications: A Review

Haptic Feedback for Microrobotics Applications: A Review

A review of micro-devices assembly techniques and technology

CAD Model-based Tracking and 3D Visual-based Control for MEMS Microassembly

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