2016
DOI: 10.1039/c6ra20355h
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A method to derivatize surface silanol groups to Si-alkyl groups in carbon-doped silicon oxides

Abstract: A carbon-doped silicon oxide (CDO) finds use as a material with a low dielectric constant (k) for copper interconnects in multilayered integrated circuits (ICs).

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Cited by 101 publications
(49 citation statements)
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“…The Si (2p) deconvoluted spectra contains bands with binding energy values corresponding to Si‐O−Si (102.7 eV) and Si‐OH (103.8 eV) for WCHA and Si−C (101.7 eV), Si‐O−C (102.1 eV), Si‐O−Si (102.9 eV) and Si‐OH (103.7 eV) for WCHA‐TG30 . The O (1 s) spectra of WCHA is characterized by various oxygen functionalities such as that in MgO (530.1 eV), CaO (531.2 eV), Si‐O−Si (532.2 eV) and carbonate group (533 eV) and in the case of WCHA‐TG30 the value at 530.1 eV, 531.1 eV, 531.7 eV, 532.3 eV, 532.7 eV, 533.1 eV and 534.6 eV corresponds to MgO, CaO, Si‐O−C, Si‐O−Si, Mg‐O−C, CO 3 2− and H 2 O respectively . The presence of graphene in the composite is further confirmed from the C (1 s) spectra.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The Si (2p) deconvoluted spectra contains bands with binding energy values corresponding to Si‐O−Si (102.7 eV) and Si‐OH (103.8 eV) for WCHA and Si−C (101.7 eV), Si‐O−C (102.1 eV), Si‐O−Si (102.9 eV) and Si‐OH (103.7 eV) for WCHA‐TG30 . The O (1 s) spectra of WCHA is characterized by various oxygen functionalities such as that in MgO (530.1 eV), CaO (531.2 eV), Si‐O−Si (532.2 eV) and carbonate group (533 eV) and in the case of WCHA‐TG30 the value at 530.1 eV, 531.1 eV, 531.7 eV, 532.3 eV, 532.7 eV, 533.1 eV and 534.6 eV corresponds to MgO, CaO, Si‐O−C, Si‐O−Si, Mg‐O−C, CO 3 2− and H 2 O respectively . The presence of graphene in the composite is further confirmed from the C (1 s) spectra.…”
Section: Resultsmentioning
confidence: 99%
“…The Si (2p) deconvoluted spectra contains bands with binding energy values corresponding to Si-OÀ Si (102.7 eV) and Si-OH (103.8 eV) for WCHA and SiÀ C (101.7 eV), Si-OÀ C (102.1 eV), Si-OÀ Si (102.9 eV) and Si-OH (103.7 eV) for WCHA-TG30. [57][58][59][60][61] The O (1 s) spectra of WCHA is characterized by various oxygen functionalities such as that in MgO (530.1 eV), 2À and aromatic π-π* interaction in graphene layers respectively. [56][57][58][59][60][61][62][63][64] Thus deconvoluted spectra of each element in the composite WCHA-TG30 confirmed the binding between graphene layers and CHA particles.…”
Section: Icp-aes Analysis Data Shown Inmentioning
confidence: 99%
“…A complementary XPS analysis is used to confirm for the chemical structural information. The survey spectra obtained from both particles prepared reveal the type of chemical bonds formed with the Si element 57 59 . In the deconvoluted high-resolution Si (2p) spectrum of the polymeric core particles, two strong peaks corresponding to Si-C (chemical bond of TPM) and Si-O-C (the silicon ethoxide group in the TPM) are observed (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…The highresolution Si 2p spectra of G@SiO 2 -AR shows the peaks at 101.6, 102.4 and 104 eV for SiÀ C, Si OÀ CÀ and OÀ Si-O, respectively. [49] The surface morphology of as prepared GO, G@SiO 2 -AR and SiO 2 @AR were investigated by using Scanning Electron Microscopy (SEM). The thin and wrinkled sheets was observed in SEM images of GO [50] ( Figure S4).…”
Section: Resultsmentioning
confidence: 99%