“…Moreover, there are hot spots on the chip, and solving such hot spots 36 , 37 requires targeted heat conduction. In the 3D integrated circuit, 38 where the hot spot effect is particularly serious, technologies such as eddy current, 39 loop, 40 thermal-sensing valve, 41 and nanofluid 42 have certain effects on enhancing heat transfer efficiency and other technologies, for example, the application of nanofluids in solar collector equipment 43 , 44 and related solar aircraft. 45 However, in the most critical active directional heat conduction method for flow, the technical difficulty lies in how to build a closed circulation fluid channel on a hard silicon wafer (or in glass) and drive the fluid in it to perform microcirculation flow.…”