A method for measuring the guideway straightness error based on polarized interference principle

Zhu, Ling-Jian; Li, Lin; Liu, Junhua; Zhang, Zhonghua

doi:10.1016/j.ijmachtools.2008.10.009

Cited by 13 publications

(8 citation statements)

References 9 publications

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“…Straightness error of the scanning stage was compensated from the worst straightness error of 20 μm/150 mm to 0.9 μm/150 mm. Zhu et al 9 proposed a new method for measuring guideway straightness error based on the polarized interference principle and affords a new way to measure straightness error in real-time with high precision. The range of measuring straightness error is above 0.5 mm with 0.5 μm resolution.…”

Section: Introductionmentioning

confidence: 99%

Development of a machine for automatically measuring static/dynamic running parallelism in linear guideways

Hsieh

Huang

Jywe

et al. 2014

Review of Scientific Instruments

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This work develops a machine for automatically measuring static/dynamic running parallelism for use in the linear guideway manufacturing industry. The automatic static/dynamic running parallelism measurement machine consists of a running parallelism measurement system, a linear motor, a precision granite air-suspension table, and a PC-based human-machine interface. The machine can be used simultaneously to measure the horizontal and vertical running parallelism of a linear guideway and automatically determine its accuracy. The measured parallelism is digitalized and analyzed to detect turning points in the linear guideway. The results concerning the accuracy of the running parallelism are not affected by the measurement platform. Experimental results showed that the standard deviation of the running parallelism measurement system is 0.4 μm and the measuring time is about 10 s for every 1000 mm of length (equal to a measuring speed of 0.1 m/s); this measurement time is 80% shorter than that of a traditional measurement system (which has a maximum speed of 1 m/s, a maximum sampling frequency of 100 kHz, and a maximum measurement length of 2000 mm).

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Section: Introductionmentioning

confidence: 99%

Development of a machine for automatically measuring static/dynamic running parallelism in linear guideways

Hsieh

Huang

Jywe

et al. 2014

Review of Scientific Instruments

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show abstract

“…In addition, Jywe et al [14] developed a multi-degrees-of-freedom measuring system and an error-compensation technique for machine tools integrating a laser interferometer for measuring displacements and a QPD for detecting straightness errors. Compared with laser collimation and diffracted beam interference method that uses grating [15,16,17,18] and polarization angle-detecting method [19,20], the advantage of using laser interferometry for straightness measurement is twofold: nanometer-scale accuracy and long travel range. Unfortunately, due to the overall heaviness of the structure, the above measurement system is difficult to install on precise positioning machinery for online measurement.…”

Section: Introductionmentioning

confidence: 99%

An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method

Tsai

2019

Sensors

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This work presents a novel and compact method for simultaneously measuring errors in linear displacement and vertical straightness of a moving linear air-bearing stage using 3D sinusoidal-groove linear reflective grating and a novel triangular wave-based sequence signal analysis method. The new scheme is distinct from the previous studies as it considers two signals to analyze linear displacement and vertical straightness. In addition, the tilt motion of the precision linear stage could also be measured using the 3D sinusoidal-groove linear reflective grating. The proposed system is similar to a linear encoder and can make online measurements of stage errors to analyze automatic processes and also be used for real-time monitoring. The performance of the proposed method and its reliability have been verified by experiments. The experiments show that the maximum error of measured tilt angle, linear displacement, and vertical straightness error is less than 0.058°, 0.239 μm, and 0.188 μm, respectively. The maximum repeatability error on measurement of tilt angle, linear displacement, and vertical straightness error is less than ±0.189o, ±0.093 μm, and ±0.016 μm, respectively. The proposed system is suitable for error compensation in the multi-axis system and finds application in most industries.

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“…Static stiffness and friction behaviour of ball bearing linear guides have been investigated experimentally [6,7]. Some papers have been published on straightness errors of various types of guides [8][9][10][11]. Some researchers have studied on joints stiffness and contact deformations of them [12,13].…”

Section: Introductionmentioning

confidence: 99%

Experimental and Analytical Investigations on Normal and Angular Stiffness of Linear Guides in Manufacturing Systems

Rahmani

Bleicher

2016

Procedia CIRP

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To find the possible error sources of manufacturing systems, the important operational characteristics of different body elements should be investigated. Stiffness is one of the most important characteristics of a machine tool's guiding system, influencing their performance and accuracy. This paper concerns with some analytical and experimental investigations on static stiffness of linear motion guides. The analytical studies are conducted using Hertzian theory. Then, we have carried out some experiments to investigate the static stiffness of industrial ball bearing linear motion guides in normal, lateral and angular directions. A maximum force of 10 kN has been applied to measure it for three preload levels of carriages and in compression and tensile directions. The results of analytical and experimental investigations have been compared. Then, the guide is driven with different velocities to find the influence of movement on the stiffness. The backlash and three different angular deflections in roll, pitch and yaw directions are measured.

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A method for measuring the guideway straightness error based on polarized interference principle

Cited by 13 publications

References 9 publications

Development of a machine for automatically measuring static/dynamic running parallelism in linear guideways

Development of a machine for automatically measuring static/dynamic running parallelism in linear guideways

An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method

Experimental and Analytical Investigations on Normal and Angular Stiffness of Linear Guides in Manufacturing Systems

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