Development of a machine for automatically measuring static/dynamic running parallelism in linear guideways

Abstract

This work develops a machine for automatically measuring static/dynamic running parallelism for use in the linear guideway manufacturing industry. The automatic static/dynamic running parallelism measurement machine consists of a running parallelism measurement system, a linear motor, a precision granite air-suspension table, and a PC-based human-machine interface. The machine can be used simultaneously to measure the horizontal and vertical running parallelism of a linear guideway and automatically determine its accuracy. The measured parallelism is digitalized and analyzed to detect turning points in the linear guideway. The results concerning the accuracy of the running parallelism are not affected by the measurement platform. Experimental results showed that the standard deviation of the running parallelism measurement system is 0.4 μm and the measuring time is about 10 s for every 1000 mm of length (equal to a measuring speed of 0.1 m/s); this measurement time is 80% shorter than that of a traditional measurement system (which has a maximum speed of 1 m/s, a maximum sampling frequency of 100 kHz, and a maximum measurement length of 2000 mm).

A Method of On-Site Describing the Positional Relation between Two Horizontal Parallel Surfaces and Two Vertical Parallel Surfaces

“…As can be seen from Figure 23 the combined projection curves obtained by mutual measurement of the two surfaces are symmetrically distributed with 0 as the center, which accords with the mathematical relationship of the data corresponding to the same position in the two surfaces in Figure 13. Finally, the data in Figure 25 were substituted into Equations (12) and (13) to obtain the difference curve between the calculated surface shape contour and the known surface shape contour, as shown in Figure 26. The curve describes the positional relation of the two surfaces.…”

“…It can be seen from Figure 25 that the calculated surface shape contours are different from the known surface shape contours, which indicates that there exists a positional relation between two surfaces PA and PB. Finally, the data in Figure 25 were substituted into Equations (12) and (13) to obtain the difference curve between the calculated surface shape contour and the known surface shape contour, as shown in Figure 26. The curve describes the positional relation of the two surfaces.…”

“…The correctness of this detection method can be proved. Finally, the data in Figure 25 were substituted into Equations (12) and (13) to obtain the difference curve between the calculated surface shape contour and the known surface shape contour, as shown in Figure 26. The curve describes the positional relation of the two surfaces.…”

“…However, because the method of evaluating the parallelism in position error is relatively simple, there is relatively little research on this aspect. Hsieh et al [13] proposed a method for measuring the parallelism of static and dynamic linear guideways. Hwang et al [14] proposed a three-probe system, which can be used to acquire the parallelism and straightness of a pair of guideways simultaneously.…”

Phase-stepping interferometry for parallelism measurement of step gauge faces

“…In order to perform measurements that are traceable to the SI-meter, the employed step gauge should be calibrated [6]. Tactile measurement techniques are generally well-known for carrying out associated precision measurements and calibration tasks [7][8][9].…”