Abstract:The article presents a measurement method driven with a non-contact optical system consisting of a mirror array by employing phase stepping interferometry to determine the surface parallelism of step gauge faces. The array houses a prism mirror to allow simultaneous interferometric measurement of two opposite step gauge faces relative to the front surface. Mechanical movement of the mirror array is detected using an alignment monitoring mirror to compensate the tilt angle of the system. The front surface of th… Show more
We derive an estimator for the step size in phase-shifting interferometry. Using a minimum of five samples, it avoids the occasional indeterminate results that afflict the traditional Carré step-size estimate. The estimator can be understood as a generalization of the modified-covariance frequency estimator for a real-valued sinusoid with an unknown mean. We describe its use in the NRC Gauge
Block Interferometer for monitoring the motion of a phase-shifting mirror mount.
We derive an estimator for the step size in phase-shifting interferometry. Using a minimum of five samples, it avoids the occasional indeterminate results that afflict the traditional Carré step-size estimate. The estimator can be understood as a generalization of the modified-covariance frequency estimator for a real-valued sinusoid with an unknown mean. We describe its use in the NRC Gauge
Block Interferometer for monitoring the motion of a phase-shifting mirror mount.
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