An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method

Abstract

This work presents a novel and compact method for simultaneously measuring errors in linear displacement and vertical straightness of a moving linear air-bearing stage using 3D sinusoidal-groove linear reflective grating and a novel triangular wave-based sequence signal analysis method. The new scheme is distinct from the previous studies as it considers two signals to analyze linear displacement and vertical straightness. In addition, the tilt motion of the precision linear stage could also be measured using the 3D sinusoidal-groove linear reflective grating. The proposed system is similar to a linear encoder and can make online measurements of stage errors to analyze automatic processes and also be used for real-time monitoring. The performance of the proposed method and its reliability have been verified by experiments. The experiments show that the maximum error of measured tilt angle, linear displacement, and vertical straightness error is less than 0.058°, 0.239 μm, and 0.188 μm, respectively. The maximum repeatability error on measurement of tilt angle, linear displacement, and vertical straightness error is less than ±0.189o, ±0.093 μm, and ±0.016 μm, respectively. The proposed system is suitable for error compensation in the multi-axis system and finds application in most industries.

A Noncontact Method for Calibrating the Angle and Position of the Composite Module Array

“…Wan et al [8] designed a 3-D displacement measurement system based on an optical freeform surface for a multiaxis system. Tsai et al [9] employed sinusoidal-groove linear reflective grating to measure the rotation angle, linear displacement, and vertical straightness.…”

Displacement Measurement Method Based on the Rotating Paraboloid Array

“…Currently, optical freeform surfaces are widely applied in various fields. In particular, because of the large amount of geometric information in an optical freeform surface, it has broad application prospects in the area of displacement measurement [26,27]. For instance, Gao realized the nanometer scale measurement of two-dimensional displacement based on an optical freeform surface with a double sinusoidal surface [28,29].…”