Abstract:Freeform surface is one of the research focuses in the measurement field. A composite module is composed of a plane and rotating paraboloid. The composite module array can identify 21 geometric errors of the machine tool in a wide range, which is composed of several composite modules. Eliminating the error of the array itself is of great significance for improving measurement accuracy. For this reason, this paper proposed a noncontact method for calibrating the angle and position of the composite module array.… Show more
“…The surface accuracy of the machined surface was guaranteed via finish grinding, so the off-axis parabolic surface after finishing was detected. A three-coordinate measuring machine (PRISMO, ZEISS, Berlin, Germany) was used to realize the contact measurement of the surface accuracy [33,34]. By controlling the probe to scan the entire machining surface, the three-dimensional coordinate point cloud data of the actual machining surface was obtained.…”
Off-axis parabolic mirrors have extensive applications in X-ray optics, with the precision of their curvature directly impacting grazing-incidence focusing performance. Notably, the off-axis parabolic surface has non-rotating and non-symmetrical characteristics. Ultra-precision raster grinding utilizing a diamond wheel is a common method. Crucially, establishing an optimal wheel path stands as the key to ensuring surface accuracy during off-axis paraboloid grinding. In this study, according to the double curvature property of an off-axis parabolic surface, two different wheel paths were compared: one tracing the meridian direction (parabolic generatrix) and the other following the arc vector direction (arc). The results showed that the wheel path in raster grinding stepping along the arc vector direction can obtain a smaller scallop height and higher surface accuracy. The surface accuracy of one step along the arc vector direction is 9.6 μm, and that of the other step along the meridian direction is 32.6 μm. A model of the scallop height was established based on the relative relationship between adjacent wheel paths, and the error is within 5%. According to the correlation between scallop height and shape error, we conducted an analysis of the spatial distribution of shape errors under varying wheel paths. The wheel path that steps along the arc vector is more suitable for raster grinding of the off-axis paraboloid. The above study can provide theoretical guidance for the wheel path planning of off-axis parabolic mirrors with high surface accuracy.
“…The surface accuracy of the machined surface was guaranteed via finish grinding, so the off-axis parabolic surface after finishing was detected. A three-coordinate measuring machine (PRISMO, ZEISS, Berlin, Germany) was used to realize the contact measurement of the surface accuracy [33,34]. By controlling the probe to scan the entire machining surface, the three-dimensional coordinate point cloud data of the actual machining surface was obtained.…”
Off-axis parabolic mirrors have extensive applications in X-ray optics, with the precision of their curvature directly impacting grazing-incidence focusing performance. Notably, the off-axis parabolic surface has non-rotating and non-symmetrical characteristics. Ultra-precision raster grinding utilizing a diamond wheel is a common method. Crucially, establishing an optimal wheel path stands as the key to ensuring surface accuracy during off-axis paraboloid grinding. In this study, according to the double curvature property of an off-axis parabolic surface, two different wheel paths were compared: one tracing the meridian direction (parabolic generatrix) and the other following the arc vector direction (arc). The results showed that the wheel path in raster grinding stepping along the arc vector direction can obtain a smaller scallop height and higher surface accuracy. The surface accuracy of one step along the arc vector direction is 9.6 μm, and that of the other step along the meridian direction is 32.6 μm. A model of the scallop height was established based on the relative relationship between adjacent wheel paths, and the error is within 5%. According to the correlation between scallop height and shape error, we conducted an analysis of the spatial distribution of shape errors under varying wheel paths. The wheel path that steps along the arc vector is more suitable for raster grinding of the off-axis paraboloid. The above study can provide theoretical guidance for the wheel path planning of off-axis parabolic mirrors with high surface accuracy.
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