A method enabling simultaneous pressure and temperature measurement using a single piezoresistive MEMS pressure sensor

Abstract

In this paper we present a high-performance, simple and low-cost method for simultaneous measurement of pressure and temperature using a single piezoresistive MEMS pressure sensor. The proposed measurement method utilizes the parasitic temperature sensitivity of the sensing element for both pressure measurement correction and temperature measurement. A parametric mathematical model of the sensor was established and its parameters were calculated using the obtained characterization data. Based on the model, a real-time sensor correction for both pressure and temperature measurements was implemented in a target measurement system. The proposed method was verified experimentally on a group of typical industrial-grade piezoresistive sensors. The obtained results indicate that the method enables the pressure measurement performance to exceed that of typical digital industrial pressure transmitters, achieving at the same time the temperature measurement performance comparable to industrial-grade platinum resistance temperature sensors. The presented work is directly applicable in industrial instrumentation, where it can add temperature measurement capability to the existing pressure measurement instruments, requiring little or no additional hardware, and without adverse effects on pressure measurement performance.

MEMS technology and applications in geotechnical monitoring: a review

“…A piezometer based on MEMS technology particularly piezoresistive sensors may improve cost and energy consumption as well as accuracy and ease of installation compared to traditional monitoring equipment. It is reported that using parametric mathematical model it is possible to measure temperature and pressure in piezoresistive sensors simultaneously with little or no additional hardware and without affecting the pressure measurement performance [148]. This may be use as a reference measurement for verifying of potentially faulty readings from other temperature sensors, an astonishing feature of this device.…”

Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor

“…Ideal for electric field measurement sensors. MEMS sensors have significant application effects in the fields of temperature detection (Ando et al, 2011;Frantlovic et al, 2016), pressure measurement (Nag et al, 2020;Sahay and Jindal, 2021), and humidity detection (Chen et al, 2016;Zhao et al, 2021), and are gradually becoming the development direction and research focus of electric field sensors. At present, the miniature electric field sensor based on MEMS technology is mainly based on the resonant structure of the charge sensing principle (KAINZ et al, 2018;Shanhong et al, 2021), All induction designs have shield plates moving above the induction electrode and shielding electrode by moving laterally.…”