Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor

Abstract

In view of the problems of large volume, high energy consumption and difficult maintenance of electric field measurement sensors in existing power systems, non-contact miniature electric field sensors have become a hot topic in current research. In this paper, a MEMS miniature electric field measurement sensor model based on the principle of piezoelectric-piezoresistive coupling is constructed, and the sensor structure is optimized by analyzing the steady-state characteristics of the piezoelectric material and semiconductor membrane of the sensor. The input and output characteristics of the sensor were tested. The test results show that the sensor has excellent mechanical strain capacity, and the output voltage of the sensor has a linear relationship with the electric field strength, thus verifying the feasibility of the sensor measurement in the electric field. The research results will provide some reference for the development of contactless coupled sensors.

A Piezoelectric–Piezoresistive Coupling Electric Field Sensor for Large Dynamic Range AC Electric Field Measurements

“…Combined with MEMS technology, they can achieve miniaturization and low power consumption. The resolution of these sensors can reach tens of V/m, with a testing range at the mV/m level [19,20]. These sensors are suitable for large-scale deployment, offering good frequency characteristics and high-temperature stability.…”