A MEMS gimbal scanner for a miniature confocal microscope

Murakami, Kenkichi; Kamiya, Y.; Karatsu, K.; Matsubara, Hiroshi; Katashiro, M.

doi:10.1109/omems.2002.1031418

Cited by 8 publications

(3 citation statements)

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“…The scanner that is illustrated in Figure 1 has a typical gimballed scanner geometry that is frequently reported in the literature [20,[28][29][30][31]. It is capable of executing a raster scan pattern in orthogonal axes.…”

Section: Scanner Design and Simulationsmentioning

confidence: 99%

Field-of-view optimization of magnetically actuated 2D gimballed scanners

Aköz¹,

Gökdel²

2020

Turk J Elec Eng & Comp Sci

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This work presents the field of view (FOV) maximization of a magnetically actuated two-dimensional (2D) gimballed scanner. The process of maximization is completed in two steps. (1) Optimization of the electrocoil providing the magnetic force that moves the scanner and (2) precise choice of optimum respective locations of both the scanner and the electrocoil. We first derived a formula relating the generated magnetic flux density, coil design parameters and driving voltage. Subsequently, we discussed the design trade-offs of an actuating electrocoil. We also conducted several experiments on a stainless steel 430 scanner having a footprint of 15 mm × 15 mm and a thickness of 460 µm. We determined the precise locations for the system components producing the maximum total optical scan angle (TOSA) hence the largest FOV. Finally, we proposed an empirically demonstrated formula, p(x1, y1) ≈ p(0.25Ls + 0.25Lm) , for the optimum electrocoil location with respect to the scanner by providing an offset ∆ x and ∆ y from the center to be able to successfully maximize the displacement and the related total optical scan angle of the system.

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Section: Scanner Design and Simulationsmentioning

confidence: 99%

Field-of-view optimization of magnetically actuated 2D gimballed scanners

Aköz¹,

Gökdel²

2020

Turk J Elec Eng & Comp Sci

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“…Figure4 shows the schematic of the electrostatic 2-D MEMS scanner with a gimbal structure [7] . The driving electrodes on the mirror part are also used as the reflective mirror.…”

Section: Electrostatic 2-d Mems Scannermentioning

confidence: 99%

A miniature confocal optical scanning microscope for endoscopes

Murakami

2005

SPIE Proceedings

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We have developed a unique miniature confocal optical scanning microscope as an endoscopic application and successfully obtained a real time image. The confocal microscope can observe the longitudinal direction of a scanning head including the electrostatic 2-D MEMS scanner and an aspherical objective lens. Waterproof packaging of the scanning head is accomplished. The MEMS scanner and the objective lens in the head are assembled precisely and compactly. The MEMS scanner has a gimbal structure and the mirror flatness and Q factor are controlled by a stress-controlled silicon nitride. The scan angle of 12deg., the mirror flatness of 80nm(PV) and the mirror reflectance of over 85% are achieved. The diameter and length of the scanning head are 3.3mm and 8mm, respectively and it can insert into a channel of the endoscope. The lateral resolution of 0.5um, the depth resolution of 2.9um, the field of view of 100*75um and over 20/s of frame rate needed for the in-vivo inspection was achieved.

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“…7 shows a cross sectional drawing of the endoscope head. The scanner is a gimbal based two-dimensional bulk micromachined electrostatic scanner[43] with the size of 1.3 mm x 1.3 mm. The mirror has the diameter of 500 um and resonant frequency of 3 kHz.…”

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confidence: 99%