A MEMS electron impact ion source integrated in a microtime-of-flight mass spectrometer

Tassetti, Charles-Marie; Mahieu, Romain; Danel, Jean-Sébastien; Peyssonneaux, Olivier; Progent, Frédéric; Polizzi, Jean-Philippe; Machuron-Mandard, Xavier; Duraffourg, Laurent

doi:10.1016/j.snb.2013.02.087

Cited by 20 publications

(11 citation statements)

References 11 publications

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“…There are several groups working on μMS [2,21,22] and some have already commercially available systems, for example the Microsaic Systems Ltd in London. One of the most interesting prototypes, denominated PIMMS (Planar Integrated Micro Mass Spectrometer), is currently under development in the Microsystem Technology laboratory at the Hamburg University of Technology (TUHH).…”

Section: Micro Mass Spectrometers (μMs)mentioning

confidence: 99%

High sensitivity field asymmetric ion mobility spectrometer

Chavarria

Matheoud

Marmillod

et al. 2017

Review of Scientific Instruments

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A high sensitivity field asymmetric ion mobility spectrometer (FAIMS) was designed, fabricated, and tested. The main components of the system are a 10.6 eV UV photoionization source, an ion filter driven by a high voltage/high frequency n-MOS inverter circuit, and a low noise ion detector. The ion filter electronics are capable to generate square waveforms with peak-to-peak voltages up to 1000 V at frequencies up to 1 MHz with adjustable duty cycles. The ion detector current amplifier has a gain up to 10 V/A with an effective equivalent input noise level down to about 1 fA/Hz during operation with the ion filter at the maximum voltage and frequency. The FAIMS system was characterized by detecting different standard chemical compounds. Additionally, we investigated the use of a synchronous modulation/demodulation technique to improve the signal-to-noise ratio in FAIMS measurements. In particular, we implemented the modulation of the compensation voltage with the synchronous demodulation of the ion current. The analysis of the measurements at low concentration levels led to an extrapolated limit of detection for acetone of 10 ppt with an averaging time of 1 s.

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Section: Micro Mass Spectrometers (μMs)mentioning

confidence: 99%

High sensitivity field asymmetric ion mobility spectrometer

Chavarria

Matheoud

Marmillod

et al. 2017

Review of Scientific Instruments

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“…The components were then assembled into a working TOFMS instrument, demonstrating trace gas detection of toluene with mass resolving power of approximately R FWHM = 100. Tassetti and coworkers fabricated a linear micro-TOFMS using MEMS technology that incorporated an orthogonal acceleration geometry and a reflectron (Tassetti et al, 2013). More recently, Vigne et al have described a 1 cm × 2 m linear monolithic micro-TOFMS fabricated using MEMS processes and demonstrated a detection limit of below 100 ppm for alkanes in helium (Vigne et al, 2017).…”

Section: Miniature Tofmsmentioning

confidence: 99%

Recent Advances in Instrumental Approaches to Time‐of‐flight Mass Spectrometry

Brais

Orejas

Schwartz

et al. 2020

Mass Spectrometry Reviews

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Time-of-flight mass spectrometry (TOFMS) is one of the simplest and most powerful approaches for mass spectrometry. Realization of the advantages inherent in TOFMS requires innovation in the theory and practice of the technique. Instrumental developments, in turn, create new capabilities that enable applications in chemical measurement. This review focuses on the recent advances in TOFMS instrumentation. New strategies for ion acceleration, multiplexed detection, miniaturized TOFMS instruments, approaches to extend the length of ion flight, and novel ion detection technologies are reviewed. Techniques that change the basic paradigm of TOFMS by measuring m/z based on ion flight distance are considered, as are applications at the frontiers of instrumental performance.

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“…Overall dimensions of the fabricated structures are 21×13×5 mm 3 , volume of ionization microchamber is approx. 0.04 cm 3 . The distances cathode-gate and cathode-anode were 1.1 mm and 3.7 mm, respectively.…”

Section: Glass Micromachiningmentioning

confidence: 99%

“…So far, different individual modules of MEMS mass spectrometer have been presented [1][2][3][4], but up to now only one on chip integrated MS has been reported [5].…”

Section: Introductionmentioning

confidence: 99%