2009
DOI: 10.1088/0957-4484/20/17/175501
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A MEMS-based high frequency x-ray chopper

Abstract: Time-resolved x-ray experiments require intensity modulation at high frequencies (advanced rotating choppers have nowadays reached the kHz range). We here demonstrate that a silicon microlever oscillating at 13 kHz with nanometric amplitude can be used as a high frequency x-ray chopper. We claim that using micro-and nanoelectromechanical systems (MEMS and NEMS), it will be possible to achieve higher frequencies in excess of hundreds of megahertz. Working at such a frequency can open a wealth of possibilities i… Show more

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Cited by 3 publications
(1 citation statement)
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“…When incorporated into existing X-ray synchrotron sources, MEMS-based X-ray optics could be used to implement compact non-accelerator approaches to control pulse characteristics such as shape and phase of an X-ray wavefront. In spite of the promise and potential of this technology, no studies have so far assessed the effectiveness of MEMS devices as X-ray optics 20 .…”
mentioning
confidence: 99%
“…When incorporated into existing X-ray synchrotron sources, MEMS-based X-ray optics could be used to implement compact non-accelerator approaches to control pulse characteristics such as shape and phase of an X-ray wavefront. In spite of the promise and potential of this technology, no studies have so far assessed the effectiveness of MEMS devices as X-ray optics 20 .…”
mentioning
confidence: 99%