A Low-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on Multi-User MEMS Process with Enhanced Output Pressure

Balasingam, Jenitha Antony; Swaminathan, Siddharth; Emadi, Arezoo

doi:10.1109/ius46767.2020.9251361

Cited by 3 publications

(1 citation statement)

References 7 publications

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“…The photoacoustic center frequencies and bandwidth also showed little variation with DC bias, albeit the photoacoustic bandwidth was higher (69%) than the pitch-catch bandwidth (41%). The higher bandwidth for photoacoustics compared to pitch-catch is due to two factors: First, in pitch-catch ultrasound imaging, spatial resolution is governed by the frequency of the transmitted acoustic wave arriving at the receiver, whereas in photoacoustic imaging, the laser pulses have nanosecond-scale excitation with much wider frequency content [ 27 , 28 ]. Second, the bandwidth for one-direction sound propagation is larger than the two-way bandwidth.…”

Section: Resultsmentioning

confidence: 99%

Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition

Cheng

Peters

Dangi

et al. 2022

Sensors

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The receive sensitivity of lead zirconate titanate (PZT) piezoelectric micromachined ultrasound transducers (PMUTs) was improved by applying a DC bias during operation. The PMUT receive sensitivity is governed by the voltage piezoelectric coefficient, h31,f. With applied DC biases (up to 15 V) on a 2 μm PbZr0.52Ti0.48O3 film, e31,f increased 1.6 times, permittivity decreased by a factor of 0.6, and the voltage coefficient increased by ~2.5 times. For released PMUT devices, the ultrasound receive sensitivity improved by 2.5 times and the photoacoustic signal improved 1.9 times with 15 V applied DC bias. B-mode photoacoustic imaging experiments showed that with DC bias, the PMUT received clearer photoacoustic signals from pencil leads at 4.3 cm, compared to 3.7 cm without DC bias.

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Section: Resultsmentioning

confidence: 99%

Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition

Cheng

Peters

Dangi

et al. 2022

Sensors

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Transduction in M/NEMS—Actuation and Sensing: A Review

Pachkawade

2024

IEEE Sensors J.

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A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

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A Low-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on Multi-User MEMS Process with Enhanced Output Pressure

Cited by 3 publications

References 7 publications

Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition

Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition

Transduction in M/NEMS—Actuation and Sensing: A Review

A review of piezoelectric MEMS sensors and actuators for gas detection application

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