2019
DOI: 10.1109/jsen.2019.2921479
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A High-Precision Absolute Angular Position Sensor With Vernier Capacitive Arrays Based on Time Grating

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Cited by 18 publications
(4 citation statements)
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“…This method can offer excellent spatial resolution by increasing the frequency of the time pulses. The performance of the sensor is independent of the hyperfine structure of the grating lines [11]. It has been proved to acquire an error of ±1 arcsec by precisely controlled transmission structure with a time-grating that can not only play a role in the positioning control, but also participate in the calculation of angular displacement for correcting errors [12].…”
Section: Introductionmentioning
confidence: 99%
“…This method can offer excellent spatial resolution by increasing the frequency of the time pulses. The performance of the sensor is independent of the hyperfine structure of the grating lines [11]. It has been proved to acquire an error of ±1 arcsec by precisely controlled transmission structure with a time-grating that can not only play a role in the positioning control, but also participate in the calculation of angular displacement for correcting errors [12].…”
Section: Introductionmentioning
confidence: 99%
“…The difference with the above sensors is that reduce the processing requirement of grating lines. At the moment, the time-grating inductive sensor, the time-grating capacitive sensor, and the time-grating moving light field sensor [20][21][22][23][24][25][26] have been suitable for industrial production and applications (e.g. rotary table for small and medium-sized machine tool, the high-speed servo motor).…”
Section: Introductionmentioning
confidence: 99%
“…They are also preferred over optical position sensors as they are immune to dust, compact, and cost-effective. Capacitive sensors provide high-accuracy output but require additional circuitry, thus increasing manufacturing complexity [8]. The Hall effect was discovered by Edwin Hall in 1897.…”
Section: Introductionmentioning
confidence: 99%