A novel inductive angular displacement sensor based on time-grating

Sun, Shu-Ming; Lv, Ze; Han, Yu; He, Zeyin; Zhang, Junming

doi:10.1088/1361-6501/ac4c68

Cited by 3 publications

(2 citation statements)

References 27 publications

(28 reference statements)

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“…This electromagnetic type can achieve an angle measurement similar to that of a photoelectric disc encoder [137][138][139][140][141]. Time grating uses a capacitive angle encoder, shown in Figure 17, and the final accuracy is within ±4.4 over a full 360 • range, which can also be used for displacement measurement [28][29][30][31][142][143][144]. There are also sensors with the Hall effect [145], and the angle measurement results show an average measured error of ±1.263 • .…”

Section: (A) Electromagnetic Method: Inductance Capacitance and Hall ...mentioning

confidence: 99%

A Review: High-Precision Angle Measurement Technologies

Wang,

Ma,

Cao

et al. 2024

Sensors

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Angle measurement is an essential component of precision measurement and serves as a crucial prerequisite for high-end manufacturing. It guides the implementation of precision manufacturing and assembly. The current angle measurement methods mainly focus on multiple axes, high precision, and large measurement ranges. This article introduces the technology of angle measurement from the perspectives of single-axis and multi-axis measurement schemes. Firstly, the single-axis measurement scheme is primarily achieved through optical methods, such as encoder discs that measure energy changes and interferometric phase changes, as well as mechanical, electromagnetic, and inertial angle measurement methods, among which interferometric methods offer the highest accuracy, with high cost, and encoder discs provide the largest measurement range with an ordinary price. Secondly, in the multi-axis measurement scheme, autocollimation instruments, including plane mirrors, gratings, and self-designed targets, are the main options. Although grating encoders can achieve three degrees of freedom in angle measurement with an ordinary price, they are limited in terms of measurement range and sensitivity compared to self-designed targets. Lastly, artificial intelligence assistance precision measurement is increasingly being embraced due to significant advancements in computer performance, making it more convenient to identify the relationship between measured values and detection values. In conclusion, angle measurement plays a crucial role in precision manufacturing, and the evolving and improving technologies provide the manufacturing industry with greater choices. The purpose of this review is to help readers quickly find more suitable technical solutions according to current application requirements, such as single/multiple axes, accuracy level, measuring range, budget, etc.

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Section: (A) Electromagnetic Method: Inductance Capacitance and Hall ...mentioning

confidence: 99%

A Review: High-Precision Angle Measurement Technologies

Wang,

Ma,

Cao

et al. 2024

Sensors

View full text Add to dashboard Cite

show abstract

“…In the field of equipment manufacturing, there are primarily two methods for achieving precision measurement: optical and electrical. Other methods are usually variations or improvements based on these two approaches [1][2][3][4][5]. One widely used electrical method is the capacitive displacement sensor, which offers nanometer-level precision at a relatively low cost, leading to its widespread adoption.…”

Section: Introductionmentioning

confidence: 99%

Long binary coding design for absolute positioning using genetic algorithm

Wang,

Luo,

Gao

et al. 2023

Optical Metrology and Inspection for Industrial Applications X

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Design and Parameter Optimization of Zero Position Code Considering Diffraction Based on Deep Learning Generative Adversarial Networks

Wang,

Luo,

2024

Nanomanuf Metrol

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Absolute measurement has consistently been the primary focus in the development of precision linear and angular displacement measurements. The scheme design of binary zero position codes is an important factor for absolute measurement. Designing and optimizing high-bit zero position codes with over 100 bits face considerable challenges. Simultaneously, the working parameters of zero position codes [unit code width (b), distance (d), and yaw angle (α)] remarkably affect their post-installation performance, particularly in absolute positioning and limit code application in multi-degree-of-freedom measurement schemes. This study addresses these challenges by proposing a design method for zero position codes that considers diffraction based on generative adversarial networks and aims to explore a design with increased efficiency and accuracy as well as optimization for high-bit zero position codes. Additionally, the tolerance range of zero positioning performance for each working parameter is examined. By leveraging the adversarial network structure, this study generates the optimization of a 150-bit code and processes the tests of the zero position code by using simulation results. The following working parameter ranges for code design are recommended on the basis of theoretical and experimental results: b greater than 10 μm, d and α within 1000 μm and 3490 μrad, and avoidance of intervals with sharp changes in the full width at half maximum. The proposed code design and parameter optimization lay a solid foundation for research and engineering applications in absolute measurement field and have considerable potential for generalization and wide applicability.

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A novel inductive angular displacement sensor based on time-grating

Cited by 3 publications

References 27 publications

A Review: High-Precision Angle Measurement Technologies

A Review: High-Precision Angle Measurement Technologies

Long binary coding design for absolute positioning using genetic algorithm

Design and Parameter Optimization of Zero Position Code Considering Diffraction Based on Deep Learning Generative Adversarial Networks

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