Abstract:A scaled double-poly MOS technology has been developed which features a static memory cell size of 1.5 mil2 with 4p design rules using conventional photolithographic techniques. The technology scales the gate oxide thickness to 4008 and polySi channel length to 2.11-1 with arsenic source-drain and self-aligned poly-poly via contact. Four different types of transistors are implemented to enhance circuit design versatility. Hot electron failures and soft errors do not limit the applicability of the technology.
OVER THE PAST FEW YEARS, there has been a groundswell of support for the use of redundancy in memory components. Redundancy may be the new innovation factor which allows bit density to continue growing at the traditional rate of 2X/year. Previous papers have described redundancy techniques for dynamic RAMS-' and other memory components3 where speed is not the primary goal. This paper will describe techniques utilized in a 40ns 16KX1 static RAM.ent technological factors and random run-to-run process defect distributions. For this 16K static RAM4, area ratios and layout density are such that peripheral circuits such as input and output buffers fail rarely and when they do, are often unrepairable. Thus attention was immediately focused on the failure modes of the memory array and its associated row and column decoders. There are several alternatives for repairing array-associated defects. These methods are best described by stating the group size of the spare repair elements, as shown in Table 1. Spare rows and columns are chosen as the best compromise between modularity and flexibility. Further analysis of the 16K static RAM technology5 indicates that spare rows provide the biggest payoff, since the polysilicon (word line and single bit) design rules are more aggressive than the metal and contact (bit line) design rules.This decision made the circuit design more difficult since the row decoders are in the critical access path whereas the column decoders have much looser speed requirements. As a result, new techniques were developed t o minimize the speed impact of redundancy.Goals for the redundancy circuits are: minimize speed/power impact, minimize added die area, allow convenient programming of fuses at wafer probe, and maximize circuit reliability.The address of a faulty element is programmed into the spare element by electrically blowing polysilicon fuses during wafer probe. The basic circuit block diagram for a spare row is shown Device failure modes are a function of the chip layout, inher-__ bdenum-Polysilicon Technology,"
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