A Grating-Coupler-Enabled CMOS Photonics Platform

Mekis, Attila; Gloeckner, S.; Masini, G.; Narasimha, A.; Pinguet, Thierry; Sahni, S.; Dobbelaere, P. De

doi:10.1109/jstqe.2010.2086049

Cited by 370 publications

(173 citation statements)

References 23 publications

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“…However, as most papers focus on coupling efficiency, polarization dependency, ease of fabrication and bandwidth, a solution for the back reflection of these grating couplers is never investigated. A typical reflection back into the waveguide for a high-efficiency grating coupler is around −17 dB [3]. Other reported high back reflections are −10 dB [4], [5] and −8 dB [6].…”

Section: Introductionmentioning

confidence: 99%

Reflectionless grating coupling for silicon-on-insulator integrated circuits

Vermeulen

Koninck

et al. 2011

8th IEEE International Conference on Group IV Photonics

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Section: Introductionmentioning

confidence: 99%

Reflectionless grating coupling for silicon-on-insulator integrated circuits

Vermeulen

Koninck

et al. 2011

8th IEEE International Conference on Group IV Photonics

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“…As opposed to edge coupling approaches, grating couplers allow both mode size matching and outof-plane light coupling anywhere on the chip surface (Fig. 1b) [5,6,7]. However, errors in fiber-tograting alignment incurred during assembly and through long-term drift of glued parts result in significant and variable optical losses, hampering the spread of this technology (Fig.…”

Section: Introductionmentioning

confidence: 99%

MEMS tunable silicon photonic grating coupler for post-assembly optimization of fiber-to-chip coupling

Errando-Herranz

Colangelo

Ahmed

et al. 2017

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)

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We experimentally demonstrate the first MEMS tunable photonic fiber-to-waveguide grating coupler, and apply it to electrostatically optimize the light coupling between an optical fiber and an on-chip silicon photonic waveguide. Efficient and stable fiber-to-chip coupling is vital for combining the high optical quality of silica fibers with the integration density of silicon photonics. Our device has the potential to lower assembly cost and extend device lifetime, by enabling electrical post-assembly adjustments.

QC 20170301

VR-HETCellRin

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“…In just the past few years, silicon has evolved into a functional platform for integrated optics [1,2]. All of the basic building blocks of photonic systems, including waveguides [3,4], modulators [5,6] and detectors [7] have been demonstrated.…”

Section: Introductionmentioning

confidence: 99%

Progress in silicon platforms for integrated optics

Novack¹,

Streshinsky²,

Ding

et al. 2014

Nanophotonics

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Rapid progress has been made in recent years repurposing CMOS fabrication tools to build complex photonic circuits. As the field of silicon photonics becomes more mature, foundry processes will be an essential piece of the ecosystem for eliminating process risk and allowing the community to focus on adding value through clever design. Multi-project wafer runs are a useful tool to promote further development by providing inexpensive, low-risk prototyping opportunities to academic and commercial researchers. Compared to dedicated silicon manufacturing runs, multi-project-wafer runs offer cost reductions of 100 × or more. Through OpSIS, we have begun to offer validated device libraries that allow designers to focus on building systems rather than modifying device geometries. The EDA tools that will enable rapid design of such complex systems are under intense development. Progress is also being made in developing practical optical and electronic packaging solutions for the photonic chips, in ways that eliminate or sharply reduce development costs for the user community. This paper will provide a review of the recent developments in silicon photonic foundry offerings with a focus on OpSIS, a multiproject-wafer foundry service offering a silicon photonics platform, including a variety of passive components as well as high-speed modulators and photodetectors, through the Institute of Microelectronics in Singapore.

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A Grating-Coupler-Enabled CMOS Photonics Platform

Cited by 370 publications

References 23 publications

Reflectionless grating coupling for silicon-on-insulator integrated circuits

Reflectionless grating coupling for silicon-on-insulator integrated circuits

MEMS tunable silicon photonic grating coupler for post-assembly optimization of fiber-to-chip coupling

Progress in silicon platforms for integrated optics

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