2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407)
DOI: 10.1109/vlsit.2003.1221088
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A functional 0.69 μm/sup 2/ embedded 6T-SRAM bit cell for 65 nm CMOS platform

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Cited by 21 publications
(18 citation statements)
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“…The cannel width of the cell is 0.12um and the gate length is 0.18um, allowing the aggressive static electrical performances re- The first thing that has to be proven is that the inclusion of the Flash and HV MOS portion of the flow is not modifying the LV CMOS performances. This can be seen in Fig.3, where the minimum power supply to obtain functionality on 2Mbit SRAM cuts is reported for two 0.67μm 2 cuts [9]. The two cuts are using cells with different threshold voltages.…”
Section: Process Flow and Architecturementioning
confidence: 92%
“…The cannel width of the cell is 0.12um and the gate length is 0.18um, allowing the aggressive static electrical performances re- The first thing that has to be proven is that the inclusion of the Flash and HV MOS portion of the flow is not modifying the LV CMOS performances. This can be seen in Fig.3, where the minimum power supply to obtain functionality on 2Mbit SRAM cuts is reported for two 0.67μm 2 cuts [9]. The two cuts are using cells with different threshold voltages.…”
Section: Process Flow and Architecturementioning
confidence: 92%
“…5. Since the layout guidelines for the 45nm technology was not available to us, we have used the layout guidelines presented in [15] which are a scaled version of the 90nm technology. They could also be obtained by scaling the sizes and dimensions given in [16].…”
Section: Areamentioning
confidence: 99%
“…VTCs for 90nm and 65nm technology nodes have been obtained using Berkeley Predictive Technology Model (BPTM) [4] and may give overly optimistic SNM values. SNM of only 95mV has been reported for 65nm technology [5], which is over four times less than for 180nm technology, while the supply voltage has been scaled down less than twice.…”
Section: Sram Stability Faultsmentioning
confidence: 94%
“…Open in contact "2" or "3" on the left-hand and right-hand sides of the cell respectively corresponds to a resistive connection of Q3 or Q4 drains to nodes A or B respectively ( Figure 8) and represents an asymmetric defect [9]. As the technology is moving towards the smaller feature sizes, the "split word line" cell layouts have been adopted by the foundries [5,8]. They have separate source contacts for each of the load PMOS devices thus increasing the total number of possible locations of open contacts which can cause DRFs or SFs to four.…”
Section: Resistive Opensmentioning
confidence: 99%
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