A frequency selective device utilizing the mechanical resonance of a silicon substrate

Design method of sensors for quantitative mechanical testing of nanomaterials in transmission electron microscopy

“…The force of the sample is: (5) It is assumed that the length, width and thickness of the sample are l s , w s and d s respectively. According to Equation (3), the strain of the sample is: (6) According to Equation ( 5), the stress of the sample is: (7) By using the above method, the mechanical signals of samples can be measured directly, and the microstructure evolution of materials can be in situ observed at atomic scale. In addition, the relationship between the stiffness of beam 1 and the stiffness of the sample needs to be fully considered in order to collect as much force data of the sample as possible through the sensor.…”

“…The MEMS system was first proposed by Richard Feynman, a Nobel laureate in physics, in a lecture in 1959. Since the 1960s, with the innovation of technology, some silicon-based microdevices, such as meteorological chromatographic analysis devices, pressure sensors, mechanical sensors, resonators, micro-mirrors and inkjet nozzle devices, have been successfully developed [7][8][9][10][11][12][13][14][15][16][17][18]. MEMS is a micron-scale mechatronics integrated device manufactured using key processes including photolithography, deposition and etching, all of which have been developed through the microfabrication of integrated circuits.…”

Liquid-Cell Transmission Electron Microscopy Observation of Two-Step Collapse Dynamics of Silicon Nanopillars on Evaporation of Propan-2-ol: Implications for Semiconductor Integration Density

“…12 Deformation of structures due to capillary interactions is also commonly observed in high-aspect-ratio structures, such as carbon nanotubes. 13−16 The deformation of nanostructures in semiconductors was first observed in microelectromechanical systems, 17 where a two-dimensional model consisting of a liquid film between rectangular walls showed that capillary interactions are the cause of the collapse of structures. 18−22 In the two-dimensional model, the Laplace pressure generated by the meniscus at a gas−liquid interface between the walls and the generation of differences in the liquid level (leveling of liquid) due to capillary interactions are considered to be dominant factors in structural collapse.…”

“…Effects of capillary interactions are often seen in everyday life, for example in the aggregation of hairs, which occurs when the forces generated to reduce the surface area of a liquid exceed the bending stiffness of wet hairs due to capillary interactions . Deformation of structures due to capillary interactions is also commonly observed in high-aspect-ratio structures, such as carbon nanotubes. − The deformation of nanostructures in semiconductors was first observed in microelectromechanical systems, where a two-dimensional model consisting of a liquid film between rectangular walls showed that capillary interactions are the cause of the collapse of structures. − In the two-dimensional model, the Laplace pressure generated by the meniscus at a gas–liquid interface between the walls and the generation of differences in the liquid level (leveling of liquid) due to capillary interactions are considered to be dominant factors in structural collapse. − Later, models have been proposed for three-dimensional structures , and for systems with liquid evaporation . From another perspective, efforts to form nanostructure patterns by controlling capillary forces have been studied. − However, most of these models are based on static energy equilibrium, and there are few examples of dynamic studies.…”

Simulation and fabrication of SiO2-based piezoresistive microbridges for chem/biosensors

“…These mechanisms include the piezoresistive approach based on polysilicon piezoresistors [5][6][7][8][9][10], the piezoelectric approach with piezoelectric (PZT) materials such as ZnO [11][12][13] and the optical approach using laser light to measure the frequency change or displacement movement [14][15][16]. These microbridges are sensitive transducers that provide the basis for mass [17][18][19], temperature [20,21], strain [22], acceleration [23] and vibration sensors [24].…”