A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale

He, Sifeng; Tang, Hui; Zhang, Kaifu; Chen, Chuangbin; Wang, Jianglin; Zhu, Zhongyuan; Gao, Jian; Cui, Chengqiang; Chen, Xin

doi:10.1109/tie.2020.2973882

Cited by 17 publications

(5 citation statements)

References 21 publications

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“…3D optical fiber align-ment was conducted with 5 DOFs, and subpixel accuracy was achieved in the motion measurement. He et al [213] presented a nano alignment system based on compliant mechanism and computer micro-vision. An improved template matching method was designed and enabled accurate alignment for advanced chip packaging.…”

Section: B Automated Micromanipulationmentioning

confidence: 99%

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A Review of Computer Microvision-Based Precision Motion Measurement: Principles, Characteristics, and Applications

Sheng

Pang

et al. 2021

IEEE Trans. Instrum. Meas.

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Micro/nano engineering is an emerging field which enables engineering and scientific discoveries in the microworld. As an effective and powerful tool for automation and manipulation at small scales, precision motion measurement by computer micro-vision is now broadly accepted and widely used in micro/nano engineering. Unlike other measurement methods, the vision-based techniques can intuitively visualize the measuring process with high interactivity, expansibility, and flexibility. This review paper aims to comprehensively present a survey of micro-vision-based motion measurement from the collective experience. Working principles of micro-vision systems are firstly introduced and described, where the hardware configuration, model calibration, and motion measurement algorithms are systematically summarized. The characteristics and performances of different micro-vision-based methods are then analyzed and discussed in terms of measurement resolution, range, degree of freedom, efficiency, and error sources. Recent advances of applications empowered by the developed computer micro-visionbased methods are also presented. The review can be helpful to researchers who engage in the development of micro-vision-based techniques, as well as provide the recent state and tendency for the research community of vision-based measurement, manipulation, and automation at micro/nano scales.

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Section: B Automated Micromanipulationmentioning

confidence: 99%

“…(h) Robotic MEMS alignment at nano scale. Panel adapted from [213] with the permission from IEEE. (i) Automated cell injections with 100% success rate.…”

Section: B Automated Micromanipulationmentioning

confidence: 99%

A Review of Computer Microvision-Based Precision Motion Measurement: Principles, Characteristics, and Applications

Sheng

Pang

et al. 2021

IEEE Trans. Instrum. Meas.

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“…Compliant mechanisms find widespread application in precision engineering, robotics, intelligent structures, and other fields. [31][32][33][34] In the design process of compliant mechanisms, the flexure hinge is critical for achieving the desired mechanism design. [35][36][37] The configuration and size parameters of flexure hinges directly affect the motion characteristics of the mechanism.…”

Section: Introductionmentioning

confidence: 99%

Highly Stretchable Conductor Inspired by Compliant Mechanism

Lu,

Deng,

Zhou

et al. 2023

Adv Elect Materials

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Flexible and stretchable conductors have invaluable applications in multiple domains, such as sensors, displays, and electronic skins. The stable conductance exhibited by conductors when subjected to diverse forms of deformation, such as tensile stress, curvature, or torsion, represents a fundamental characteristic. Attaining high conductivity and stretchability simultaneously in conductive materials is a formidable challenge, owing to inherent constraints in materials found in nature. To overcome this problem, an innovative approach of structurally designing conductors using existing materials to achieve high deformability and stretchability, i.e. stretchable conductors inspired by a compliant mechanism is proposed in this paper. Thus, a novel stretchable conductor inspired by flexible mechanisms is introduced. Unlike stretchable conductors based on Kirigami structures, the stretchable conductor based on flexible mechanisms can achieve large in‐plane deformation within the material's strength limit. The concept and design process of the highly deformable stretchable conductor inspired by flexible mechanisms are presented in this paper. Experimental results show that the resistance change ratio of the conductor remains within 0.05% during the 0–200% strain process. The consistency and durability of the conductor during stretching deformation are also confirmed through 500 repetitions of the test. Additionally, the experiments with the electric motor and light‐emitting diode (LED) light confirm the conductor's ability to maintain a stable current.

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“…As shown in Fig. 1, after removing the bad points in the second step, high-precision alignment system needs to be adopted in the fourth step, which is utilized to quickly achieve the LED chip & substrate precision alignment (accuracy ≤1 µm) [6], [7]. Unfortunately, due to the environmental temperature drift, the stage will generate thermal distortion, such as warpage and depression, which will seriously affect alignment precision [8]- [11].…”

Section: Introductionmentioning

confidence: 99%

A Novel Decoupled Flexure Nanopositioner With Thermal Distortion Self-Elimination Function

Jia

Tang

et al. 2022

IEEE/ASME Trans. Mechatron.

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A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale

Cited by 17 publications

References 21 publications

A Review of Computer Microvision-Based Precision Motion Measurement: Principles, Characteristics, and Applications

A Review of Computer Microvision-Based Precision Motion Measurement: Principles, Characteristics, and Applications

Highly Stretchable Conductor Inspired by Compliant Mechanism

A Novel Decoupled Flexure Nanopositioner With Thermal Distortion Self-Elimination Function

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