A Review of Computer Microvision-Based Precision Motion Measurement: Principles, Characteristics, and Applications

Abstract

Micro/nano engineering is an emerging field which enables engineering and scientific discoveries in the microworld. As an effective and powerful tool for automation and manipulation at small scales, precision motion measurement by computer micro-vision is now broadly accepted and widely used in micro/nano engineering. Unlike other measurement methods, the vision-based techniques can intuitively visualize the measuring process with high interactivity, expansibility, and flexibility. This review paper aims to comprehensively present a survey of micro-vision-based motion measurement from the collective experience. Working principles of micro-vision systems are firstly introduced and described, where the hardware configuration, model calibration, and motion measurement algorithms are systematically summarized. The characteristics and performances of different micro-vision-based methods are then analyzed and discussed in terms of measurement resolution, range, degree of freedom, efficiency, and error sources. Recent advances of applications empowered by the developed computer micro-visionbased methods are also presented. The review can be helpful to researchers who engage in the development of micro-vision-based techniques, as well as provide the recent state and tendency for the research community of vision-based measurement, manipulation, and automation at micro/nano scales.

Pose Measurement at Small Scale by Spectral Analysis of Periodic Patterns

“…This has led a new challenge in pose measurement to emerge as the perspective projection on the camera becomes weaker. As recently observed by Yao et al (2021) in a survey of different pose measurement techniques in the microscopy field, this change in the scale at which measurement occurs raises newly complicates process of retrieving the pose of an observed object.…”

Large-Workspace Polyarticulated Micro-Structures Based-On Folded Silica for Tethered Nanorobotics

“…To achieve multi-degree-of-freedom motion at the corresponding scale, the dimensions of the robotic system need to be as close as possible to the scale of the manipulation target to obtain sufficient manipulation dexterity. For nanorobotic applications, the size of their structures of interest is typically smaller than 100 µm [3], [15], [16]. Further research and development is needed to achieve more advanced micro structures with experimentally measured large workspace and high repeatability to verify their feasibility of application to nanorobotics.…”

“…The devices in the area above the dotted line indicate that they have a large workspace compared to their size. Among them, large workspace sub-100 µm devices are in high demand for the development of nanorobotics [3], [15], [16].…”

Innovative Image Processing Method to Improve Autofocusing Accuracy

“…Their main advantages are being highly accurate and time-saving in comparison with passive control autofocusing technologies [17,21]. As a result, autofocusing technologies with active control are popularly used in many AOI applications, precise laser printing, and laser machining with real-time and precise measurements [22][23][24][25][26][27][28][29][30][31][32]. As for the demand of critical requirements, the autofocusing technologies with active control are required to further improve their autofocusing accuracy.…”