A flat type touch probe sensor using PZT thin film vibrator

Kanda, Takefumi; Morita, Takeshi; Kurosawa, Minoru Kuribayashi; Higuchi, Toshiro

doi:10.1016/s0924-4247(00)00298-3

Cited by 62 publications

(21 citation statements)

References 7 publications

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“…In carbon nanotubes, the shank lengths are only in a region of a few micrometers long and also cause adhesive effects due to van der Wals forces which can be overcome by using resonating probes. To minimize this influence, different techniques have been evaluated such as: torsional [54], longitudinal [55], and lateral vibrations in SPM and AFM [56]. Compared to carbon nanotubes, the Ag 2 Ga offers a versatile probe, room temperature probe fabrication and also an ability to grow probes of any length with high rigidity [7].…”

Section: Discussionmentioning

confidence: 99%

A Thermoacoustic Model for High Aspect Ratio Nanostructures

2016

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Abstract:In this paper, we have developed a new thermoacoustic model for predicting the resonance frequency and quality factors of one-dimensional (1D) nanoresonators. Considering a nanoresonator as a fix-free Bernoulli-Euler cantilever, an analytical model has been developed to show the influence of material and geometrical properties of 1D nanoresonators on their mechanical response without any damping. Diameter and elastic modulus have a direct relationship and length has an inverse relationship on the strain energy and stress at the clamp end of the nanoresonator. A thermoacoustic multiphysics COMSOL model has been elaborated to simulate the frequency response of vibrating 1D nanoresonators in air. The results are an excellent match with experimental data from independently published literature reports, and the results of this model are consistent with the analytical model. Considering the air and thermal damping in the thermoacoustic model, the quality factor of a nanowire has been estimated and the results show that zinc oxide (ZnO) and silver-gallium (Ag 2 Ga) nanoresonators are potential candidates as nanoresonators, nanoactuators, and for scanning probe microscopy applications.

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Section: Discussionmentioning

confidence: 99%

A Thermoacoustic Model for High Aspect Ratio Nanostructures

2016

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“…We have reported a micro-ultrasonic motor [1], a vibration touch probe sensor [2,3], and an ear horn [4], all of which use hydrothermal PZT ®lm. The hydrothermal method utilizes the chemical reaction between titanium base metal and the melted ions at high temperatures in aqueous solutions.…”

Section: Hydrothermal Deposition Of Pzt Filmmentioning

confidence: 99%

“…About the process, there are two different ways for different applications. The process A indicated in Table 1 was applied to sensors [3]. This process is based on the single process [7] for the ®rst step.…”

Section: Hydrothermal Deposition Of Pzt Filmmentioning

confidence: 99%

Performance of hydrothermal PZT film on high intensity operation

Kurosawa

Yasui

Kanda

et al. 2001

Sensors and Actuators A: Physical

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The deposition processes of PZT thin ®lms have been described in many reports, yet there have been no descriptions of the performance of PZT ®lms at high intensity operation. Hydrothermally-deposited PZT ®lm transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT ®lm expresses superior performance with regard to linearity and maximum vibration velocity. The linearity of frequency responses at around the resonance frequency was excellent and superior to bulk material up to high intensity operation. The characteristics of longitudinal transducers using ®lms formed under two deposition processes were tested. The maximum vibration velocity was 2.24 m/s when the thickness of the ®lm was 38 mm and the driving voltage was 145 V p±p . This velocity value was much larger than bulk PZT materials for high power applications. #

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“…Unlike classical modes like transversal bending resonating mode, the called 31's longitudinal mode works at higher frequencies. We thus expect better sensitivity and lower viscous and piezoelectric losses without reducing both the cantilever size and the gas interaction surface [3].…”

Section: Introductionmentioning

confidence: 99%

Sensor Application Using Longitudinal Mode of Screen-Printed PZT Cantilever

et al. 2009

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High gas sensitivity, expected when using the unusual longitudinal vibration mode of PZT cantilever for such application, is based on its higher resonant frequency when compared to transversal bending mode. For this purpose, a new PZT cantilever structure has been fabricated with thick-film technology based on the sacrificial layer method. This structure is well adapted to generate the 31's longitudinal vibration. Studies of the composition and microstructure of Au/PZT/Au beam show the harmlessness of the process. Advantage of the 31's longitudinal mode for gas detection is confirmed by the values of resonant frequency and good quality factor for a 8x2x0.08 mm 3 PZT based cantilever. Indeed, taking a 0.1Hz frequency resolution for the second 31 mode, the limit of detection of 6 ppm toluene is reached with a 44µm PEUT coating.

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A flat type touch probe sensor using PZT thin film vibrator

Cited by 62 publications

References 7 publications

A Thermoacoustic Model for High Aspect Ratio Nanostructures

A Thermoacoustic Model for High Aspect Ratio Nanostructures

Performance of hydrothermal PZT film on high intensity operation

Sensor Application Using Longitudinal Mode of Screen-Printed PZT Cantilever

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