Performance of hydrothermal PZT film on high intensity operation

Abstract

The deposition processes of PZT thin ®lms have been described in many reports, yet there have been no descriptions of the performance of PZT ®lms at high intensity operation. Hydrothermally-deposited PZT ®lm transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT ®lm expresses superior performance with regard to linearity and maximum vibration velocity. The linearity of frequency responses at around the resonance frequency was excellent and superior to bulk material up to high intensity operation. The characteristics of longitudinal transducers using ®lms formed under two deposition processes were tested. The maximum vibration velocity was 2.24 m/s when the thickness of the ®lm was 38 mm and the driving voltage was 145 V p±p . This velocity value was much larger than bulk PZT materials for high power applications. #

Piezoelectric Thick Film Based on Bonding technologies for Energy Harvester

“…(23) The fabricated device under the d 31 mode generated a maximum output power of 2.765 μW at 255.9 Hz at an acceleration of 2.5g. In addition, a hydrothermal method (24) and a screen printing process (25) have been developed for thick films over 5 μm in thickness. Lei et al (26) combined the thick-film screen printing technique and a micromachining process using a silicon on insulator (SOI) wafer to fabricate a microcantilever with a unimorph PZT thick film.…”

Hydrothermally Grown PZT Thick Films on Ba(Zr,Ti)O3 Substrates

“…For the growth of Pb(Zr,Ti)O 3 films, various substrates were used, including Ti [16,17], SrTiO 3 and LaAlO 3 [11,12]. In the present investigation, we produced heteroepitaxial PZT films on Ba(Zr 0.1 Ti 0.9 )O 3 (BZT) single crystals as a new substrate material with virtually no lattice mismatch to the films by hydrothermal synthesis.…”

A piezoelectric micro generator worked at low frequency and high acceleration based on PZT and phosphor bronze bonding

“…Wasted mechanical energy from ambient vibrations can be transformed into useful electrical power. Therefore, a variety of harvesters have been proposed to convert ambient energy into electrical energy under different mechanisms, including electromagnetic12345, electrostatic678910, triboelectric11121314151617 and piezoelectric1819202122232425262728293031323334 mechanisms. However, the output power of these devices based on the first three mechanisms fabricated with complex fabrication processes cannot satisfy the power supply of electronic devices.…”

“…5 μm PZT film for d 31 and d 33 modes MEMS generators was prepared by an aerosol deposition process21. In addition, a hydrothermal method22 and screen printing23 process have been developed for thick films over 5 μm in thickness. A sintering temperature larger than 550 °C can provide high piezoelectricity24, which limits the application of the following MEMS fabrication process.…”