A finite element method modeling approach for the development of metal/silicon nitride MEMS single-use valve arrays

Abstract

The problem of controlled liquid delivery to a microelectromechanical system (MEMS) device is one that is being continuously investigated. There are many types of valves being fabricated for different applications. For single-use systems, burst valves are an ideal choice. These types of valves ensure that there is no leaking of the fluid to the rest of the system. Models have been developed using COMSOL multiphysics incorporated in an optimization routine to study and predict the behavior of valves made with metallic resistors over silicon nitride membranes, with the goal of developing a tool that can be used to design low-power valves. Power and temperature data for valves made in our MEMS facility have been used to obtain an average overall heat transfer coefficient, which in turn is used to predict the voltage, temperature and stress of the breaking point of the valves. The simulation results were found to be adequate to represent the behavior of valves for two ohmic heater designs fabricated with gold and platinum. The models can be used to compare different valve designs to minimize the energy required for actuation. Experimental data showed that the valves could be broken with between 15 and 50 mJ.

MEMS Biomedical Sensor for Gait Analysis

“…The Von Mises stress values are considered a good indicator to determine whether a design is suitable or not (Bistue et al, 1997). As the Von Mises stress is the effective stress acting in the membrane, if the membrane Von Mises stress is more than the fracture stress, the material will break (Cardenas et al, 2007). The Von Misses stress is observed at its maximum at the center of the membrane where deflection is at its peak.…”

Novel enhancement of thin-form-factor galvanic cells: Probing halogenated organic oxidizers and metal anodes

“…Also, mechanical micro valves and vents are currently being developed for the development of automated batteries [45,46].…”

Electro-thermally induced structural failure actuator (ETISFA) for implantable controlled drug delivery devices based on Micro-Electro-Mechanical-Systems

“…Analogous fuse mechanisms for microfluidics were recently utilized for one-time use valves for controlling flow. 17,18 That work demonstrated that metallic fuses can effectively induce structural failure of membranes, but was limited to the millimetre scale and did not characterize the effects of the fuse cross-sectional geometry on activation.…”