2010
DOI: 10.1039/c005135g
|View full text |Cite
|
Sign up to set email alerts
|

Electro-thermally induced structural failure actuator (ETISFA) for implantable controlled drug delivery devices based on Micro-Electro-Mechanical-Systems

Abstract: A new electro-thermally induced structural failure actuator (ETISFA) is introduced as an activation mechanism for on demand controlled drug delivery from a Micro-Electro-Mechanical-System (MEMS). The device architecture is based on a reservoir that is sealed by a silicon nitride membrane. The release mechanism consists of an electrical fuse constructed on the membrane. Activation causes thermal shock of the suspended membrane allowing the drugs inside of the reservoir to diffuse out into the region of interest… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
9
0

Year Published

2011
2011
2021
2021

Publication Types

Select...
5
3

Relationship

0
8

Authors

Journals

citations
Cited by 17 publications
(9 citation statements)
references
References 40 publications
0
9
0
Order By: Relevance
“…It is a multidisciplinary field intersecting engineering, physics, chemistry, microtechnology, and biotechnology, with practical applications to the design of systems in which such small volumes of fluids will be used. Microfluidics has emerged at the beginning of the 1980s and is used in the development of DNA chips, labon-chip technology, micropropulsion, and microthermal technologies [69][70][71].…”
Section: Paa Hydrogels For Microfluidics and Lab-on-chip Applicationsmentioning
confidence: 99%
“…It is a multidisciplinary field intersecting engineering, physics, chemistry, microtechnology, and biotechnology, with practical applications to the design of systems in which such small volumes of fluids will be used. Microfluidics has emerged at the beginning of the 1980s and is used in the development of DNA chips, labon-chip technology, micropropulsion, and microthermal technologies [69][70][71].…”
Section: Paa Hydrogels For Microfluidics and Lab-on-chip Applicationsmentioning
confidence: 99%
“…This electrical pulse causes resistive heating, which causes expansion of the gold fuse and rupture, ‘activation’, of the underlying nitride membrane (34). The patency of each membrane can be assessed by monitoring the electrical resistance across the respective leads.…”
Section: 0 Resultsmentioning
confidence: 99%
“…The fabrication process for the microchip portion of the active device has been described previously (34). Briefly, one side of the wafer was patterned via standard photolithography and etched via reactive ion etching (RIE) to define ~720 μm by 720 μm regions of bare silicon.…”
Section: Methodsmentioning
confidence: 99%
“…Apart from the major actuation techniques discussed above, other concepts such as electro-thermal, dielectrophoretic and electrostatic actuations have also shown potential Electrothermal actuation incorporates a V-shaped beam which is subjected to thermal expansion stretching along the apex. [62][63][64] Although this technique has been extensively used for micromanipulation in MEMS technology, it has not yet been exploited due to the thermosensitivity of cells. However, a number of researchers have employed the thermal expansion properties of shape memory alloy (SMA) for cell stretching.…”
Section: Other Actuatorsmentioning
confidence: 99%