A double-sided single-chip wireless pressure sensor

DeHennis, A.; Wise, K.D.

doi:10.1109/memsys.2002.984250

Cited by 73 publications

(49 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The obtained phase-dip-distance product analogous to gain-bandwidth product was higher for larger reader coils. Both the near-field and far-field coil coupling situations were well described by (15) and were in good agreements with theoretical expectations [14], [31], [34]- [36]. With these findings, the ultimate reader coil can be properly designed and realized as part of the glasses-type reader shown in Fig.…”

Section: A On-bench Characterizationsupporting

confidence: 81%

“…is the quality factor of the sensor at resonance, and k is the coupling coefficient of the inductive link (totally dependent on physical geometries such as the planar size of the sensor and reader coils, and the separation distance between the coils [15], [23]). Therefore, from (2), a phase-dip technique can be applied to wirelessly detect the resonant frequency of the sensor as the phase of the complex impedance Z eq drops to the minimum in the frequency scan from the measurement instrument, such as an impedance analyzer, network analyzer, or other involving customized electronics.…”

Section: A System Overviewmentioning

confidence: 99%

See 1 more Smart Citation

Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant

Chen

Saati

Varma

et al. 2010

J. Microelectromech. Syst.

238

130

View full text Add to dashboard Cite

Abstract-This paper presents an implant-based wireless pressure sensing paradigm for long-range continuous intraocular pressure (IOP) monitoring of glaucoma patients. An implantable parylene-based pressure sensor has been developed, featuring an electrical LC-tank resonant circuit for passive wireless sensing without power consumption on the implanted site. The sensor is microfabricated with the use of parylene C (poly-chlorop-xylylene) to create a flexible coil substrate that can be folded for smaller physical form factor so as to achieve minimally invasive implantation, while stretched back without damage for enhanced inductive sensor-reader coil coupling so as to achieve strong sensing signal. A data-processed external readout method has also been developed to support pressure measurements. By incorporating the LC sensor and the readout method, wireless pressure sensing with 1-mmHg resolution in longer than 2-cm distance is successfully demonstrated. Other than extensive on-bench characterization, device testing through six-month chronic in vivo and acute ex vivo animal studies has verified the feasibility and efficacy of the sensor implant in the surgical aspect, including robust fixation and long-term biocompatibility in the intraocular environment. With meeting specifications of practical wireless pressure sensing and further reader development, this sensing methodology is promising for continuous, convenient, direct, and faithful IOP monitoring.[ 2009-0111]Index Terms-Implantable microdevice, intraocular pressure (IOP), LC pressure sensor, parylene, wireless sensing.

show abstract

Section: A On-bench Characterizationsupporting

confidence: 81%

Section: A System Overviewmentioning

confidence: 99%

Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant

Chen

Saati

Varma

et al. 2010

J. Microelectromech. Syst.

238

130

View full text Add to dashboard Cite

show abstract

“…The equivalent circuit schematic of the sensing system is shown in Figure 1a, and the equivalent impedance viewed from the test antenna can be devised using circuit analysis, as in [16][17][18]. …”

Section: Measurement Principle and Structure Designmentioning

confidence: 99%

Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

Tan

Zhang

et al. 2014

Micromachines

View full text Add to dashboard Cite

Abstract:In this paper, a novel capacitance pressure sensor based on Low-Temperature Co-Fired Ceramic (LTCC) technology is proposed for pressure measurement. This approach differs from the traditional fabrication process for a LTCC pressure sensor because a 4J33 iron-nickel-cobalt alloy is applied to avoid the collapse of the cavity and to improve the performance of the sensor. Unlike the traditional LTCC sensor, the sensitive membrane of the proposed sensor is very flat, and the deformation of the sensitivity membrane is smaller. The proposed sensor also demonstrates a greater responsivity, which reaches as high as 13 kHz/kPa in range of 0-100 kPa. During experiments, the newly fabricated sensor, which is only about 6.5 cm 2 , demonstrated very good performance: the repeatability error, hysteresis error, and nonlinearity of the sensor are about 4.25%, 2.13%, and 1.77%, respectively.

show abstract

“…Recently, microfabricated coils have been adopted as receivers in inductive links to reduce the size of the receiving side and to explore the possibility of integration with other micro-devices to establish a system-on-achip [11][12][13][14][15]. It is highly desirable to exploit the miniaturization made available by planar processing, and to determine the link properties of integrated receiving coils.…”

Section: Introductionmentioning

confidence: 99%

An Inductive Link with Integrated Receiving Coil—Coupling Coefficient and Link Efficiency

Cheng

Quinn²,

Bernstein

2005

J Comput Electron

View full text Add to dashboard Cite

Inductive powering can free microelectromechanical systems (MEMS) devices from tethering to a power supply, thus expanding their scope of applications. We investigate inductive powering for MEMS using a microfabricated coil as a receiver operating at and below 1 MHz. The microcoil is designed to enclose the MEMS functions to achieve maximum coupling, and is built into a silicon substrate by our inlaid electroplating process, so that the microcoil has a small resistance despite its long trace. Non-negligible parasitic effects from the silicon substrate affect the characterization of an inductive link and its optimization. Taking into account the parasitic effects of Si microcoils, the coupling coefficient of the link is determined by a coil-model scheme that is different from conventional strategies. Furthermore, an equivalent circuit is developed for our link and used to analyze link operation over the frequency range of 4 kHz to 4 MHz. With measured link parameters, link efficiency is calculated with our equivalent circuit, and the results agree better with experiments than do conventional models. The equivalent circuit also indicates that microcoils with high quality factor at low frequencies, such as our inlaid electroplated coils, improve link performance, while parasitic capacitance has little effect.

show abstract

A double-sided single-chip wireless pressure sensor

Cited by 73 publications

References 4 publications

Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant

Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant

Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

An Inductive Link with Integrated Receiving Coil—Coupling Coefficient and Link Efficiency

Contact Info

Product

Resources

About