A differential interferometer for scanning force microscopy

Cunningham, Michael J.; Cheng, Stone; Clegg, W.W.

doi:10.1088/0957-0233/5/11/005

Cited by 21 publications

(8 citation statements)

References 12 publications

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“…To minimize perturbation arising from environmental fluctuation, Schönenberger et al and Cunningham et al proposed a differential interferometer for force microscopy in which the reference arm and measurement arm are arranged in parallel by using a Wollaston prism to separate the reference and measurement beams [16,17]. Lee et al developed a differential laser interferometer for studying the steady-state and dynamic behavior of slider/disk system by using two parallel separate interferometer arms [18].…”

Section: Measurement Science and Technologymentioning

confidence: 99%

A differential Michelson interferometer with orthogonal single frequency laser for nanometer displacement measurement

Yan

Chen

Wang

2017

Meas. Sci. Technol.

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A novel differential Michelson laser interferometer is proposed to eliminate the influence of environmental fluctuations for nanometer displacement measurement. This differential interferometer consists of two homodyne interferometers in which two orthogonal single frequency beams share common reference arm and partial measurement arm. By modulating the displacement of the common reference arm with a piezoelectric transducer, the common-mode displacement drift resulting from the environmental disturbances can be well suppressed and the measured displacement as differential-mode displacement signal is achieved. In addition, a phase difference compensation method is proposed for accurately determining the phase difference between interference signals by correcting the time interval according to the average speed in one cycle of interference signal. The nanometer displacement measurement experiments were performed to demonstrate the effectiveness and feasibility of the proposed interferometer and show that precision displacement measurement with standard deviation less than 1 nm has been achieved.

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Section: Measurement Science and Technologymentioning

confidence: 99%

A differential Michelson interferometer with orthogonal single frequency laser for nanometer displacement measurement

Yan

Chen

Wang

2017

Meas. Sci. Technol.

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“…They use birefringent elements to split an incident light into two beams of crossed polarization which are both focused on the cantilever (or on a reference mirror strongly connected to it 33,34 ). Those systems have shot noise limited performances, and as such are as good as our realization: the baseline for the background noise reached in these experiments is around 10 −14 m/ √ Hz for comparable incident light power.…”

Section: Comparison With Other Devicesmentioning

confidence: 99%

Quadrature phase interferometer for high resolution force spectroscopy

Paolino

Sandoval

Bellon

2013

Review of Scientific Instruments

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In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the cantilever tip and a reference beam reflecting on the static base of the sensor. A design with very low environmental susceptibility and another allowing calibrated measurements on a wide spectral range are described. Both enable a very high resolution (down to 2.5×10(-15) m/√Hz), illustrated by thermal noise measurements on AFM cantilevers. They present an excellent long-term stability and a constant sensitivity independent of the optical phase of the interferometer. A quick review shows that our precision is equaling or out-performing the best results reported in the literature, but for a much larger deflection range, up to a few μm.

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“…Piezoceramic materials can be incorporated into microsystems by additive processes such as sputtering [21], laser-assisted ablative sputtering [22], sol-gel deposition [23], organometallic chemical vapor deposition [24] and screen printing [25], or by a subtractive process such as ultrasonic micromachining [26]. Microsystems that are based on the ability of PZT to convert electrical energy to mechanical vibrations, and vice versa, include scanning mirror drives [27], micro-optics [28][29][30], micromixers [31], accelerometer [32], micro-surgery [33,34] and scanning microscopy probes [35]. This paper explores the possibility of using PZT as a material for microheaters and its possible biomedical applications such as tissue cauterization (figure 1).…”

Section: Introductionmentioning

confidence: 99%

Microheaters based on ultrasonic actuation of piezoceramic elements

Visvanathan

Gianchandani²

2011

J. Micromech. Microeng.

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This paper describes the use of micromachined lead zirconate titanate (PZT) piezoceramic elements for heat generation by ultrasonic energy dissipated within the elements and surrounding media. Simulations based on three-dimensional finite-element models suggest that circular disk-shaped elements provide superior steady-state temperature rise for a given cross-sectional area, volume of the PZT element and drive voltage. Experimental validation is performed using PZT-5A heaters of 3.2 mm diameter and 0.191 mm thickness. Single-element heaters and dual-element stacks are evaluated. Although the steady-state temperature generated by these heaters reaches the maximum value at the frequency of maximum electromechanical conductance, the heating effectiveness is maximized at the frequency of maximum electromechanical impedance. Stacked PZT heaters provide 3.5 times the temperature rise and 3 times greater heating effectiveness than single elements. Furthermore, the heaters attain the maximum heating effectiveness when bonded to highly damping and non-conducting substrates. A maximum temperature of 120 • C is achieved at 160 mW input power. Experiments are performed using porcine tissue samples to show the feasibility of using PZT heaters in tissue cauterization. A PZT heater probe brands a porcine tissue in 2-3 s with 10 V RMS drive voltage. The interface temperature is ≈150 • C.

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A differential interferometer for scanning force microscopy

Cited by 21 publications

References 12 publications

A differential Michelson interferometer with orthogonal single frequency laser for nanometer displacement measurement

A differential Michelson interferometer with orthogonal single frequency laser for nanometer displacement measurement

Quadrature phase interferometer for high resolution force spectroscopy

Microheaters based on ultrasonic actuation of piezoceramic elements

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