A laser homodyne straightness interferometer with simultaneous measurement of six degrees of freedom motion errors is proposed for precision linear stage metrology. In this interferometer, the vertical straightness error and its position are measured by interference fringe counting, the yaw and pitch errors are obtained by measuring the spacing changes of interference fringe and the horizontal straightness and roll errors are determined by laser collimation. The merit of this interferometer is that four degrees of freedom motion errors are obtained by using laser interferometry with high accuracy. The optical configuration of the proposed interferometer is designed. The principle of the simultaneous measurement of six degrees of freedom errors including yaw, pitch, roll, two straightness errors and straightness error's position of measured linear stage is depicted in detail, and the compensation of crosstalk effects on straightness error and its position measurements is presented. At last, an experimental setup is constructed and several experiments are performed to demonstrate the feasibility of the proposed interferometer and the compensation method.
A laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters is proposed. The optical configuration of the proposed system is designed and the mathematic model for simultaneously measuring six degrees of freedom parameters of the measured object including three rotational parameters of the yaw, pitch and roll errors and three linear parameters of the horizontal straightness error, vertical straightness error and straightness error's position is established. To address the influence of the rotational errors produced by the measuring reflector in laser straightness interferometer, the compensation method of the straightness error and its position is presented. An experimental setup was constructed and a series of experiments including separate comparison measurement of every parameter, compensation of straightness error and its position and simultaneous measurement of six degrees of freedom parameters of a precision linear stage were performed to demonstrate the feasibility of the proposed system. Experimental results show that the measurement data of the multiple degrees of freedom parameters obtained from the proposed system are in accordance with those obtained from the compared instruments and the presented compensation method can achieve good effect in eliminating the influence of rotational errors on the measurement of straightness error and its position.
A precision PGC demodulation for homodyne interferometer modulated with a combined sinusoidal and triangular signal is proposed. Using a triangular signal as additional modulation, a continuous phase-shifted interference signal for ellipse fitting is generated whether the measured object is in static or moving state. The real-time ellipse fitting and correction of the AC amplitudes and DC offsets of the quadrature components in PGC demodulation can be realized. The merit of this modulation is that it can eliminate thoroughly the periodic nonlinearity resulting from the influences of light intensity disturbance, the drift of modulation depth, the carrier phase delay, and non-ideal performance of the low pass filters in the conversional PGC demodulation. The principle and realization of the signal processing with the combined modulation signal are described in detail. The experiments of accuracy and rate evaluations of ellipse fitting, nanometer, and millimeter displacement measurements were performed to verify the feasibility of the proposed demodulation. The experimental results show that the elliptical parameters of the quadrature components can be achieved precisely in real time and nanometer accuracy was realized in displacement measurements.
A laser synthetic wavelength interferometer that is capable of achieving large displacement measurement with nanometer accuracy is developed. The principle and the signal processing method of the interferometer are introduced. The displacement measurement experiments and the comparisons with a commercial interferometer both in small and large ranges are performed in order to verify the performance of the interferometer. Experimental results show that the average errors and standard deviations of the interferometer are in accordance with those obtained from the commercial interferometer. The resolution and the nonlinearity of the interferometer are also discussed in detail. These results show that the development of the interferometer is reasonable and feasible.
A novel differential Michelson laser interferometer is proposed to eliminate the influence of environmental fluctuations for nanometer displacement measurement. This differential interferometer consists of two homodyne interferometers in which two orthogonal single frequency beams share common reference arm and partial measurement arm. By modulating the displacement of the common reference arm with a piezoelectric transducer, the common-mode displacement drift resulting from the environmental disturbances can be well suppressed and the measured displacement as differential-mode displacement signal is achieved. In addition, a phase difference compensation method is proposed for accurately determining the phase difference between interference signals by correcting the time interval according to the average speed in one cycle of interference signal. The nanometer displacement measurement experiments were performed to demonstrate the effectiveness and feasibility of the proposed interferometer and show that precision displacement measurement with standard deviation less than 1 nm has been achieved.
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