Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters

Abstract

A laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters is proposed. The optical configuration of the proposed system is designed and the mathematic model for simultaneously measuring six degrees of freedom parameters of the measured object including three rotational parameters of the yaw, pitch and roll errors and three linear parameters of the horizontal straightness error, vertical straightness error and straightness error's position is established. To address the influence of the rotational errors produced by the measuring reflector in laser straightness interferometer, the compensation method of the straightness error and its position is presented. An experimental setup was constructed and a series of experiments including separate comparison measurement of every parameter, compensation of straightness error and its position and simultaneous measurement of six degrees of freedom parameters of a precision linear stage were performed to demonstrate the feasibility of the proposed system. Experimental results show that the measurement data of the multiple degrees of freedom parameters obtained from the proposed system are in accordance with those obtained from the compared instruments and the presented compensation method can achieve good effect in eliminating the influence of rotational errors on the measurement of straightness error and its position.

Embedded Sensor System for Five-degree-of-freedom Error Detection on Machine Tools

“…Ni [18,19] developed a series of 3-beam MDFM systems for monitoring errors of the coordinate measurement machine and machine tool. Chen [20] and Li [21] applied MDFM to simultaneously measure the 6-DOF and 5-DOF errors of a rotary axis, respectively. Commercial MDFM systems are also available on the market, such as XM-60 (Renishaw Inc, UK), XD5 (API Inc, USA) and SP1500 C5 (SIOS Gmbh, Germany) [22] .…”

A Geometric Error Measurement System for Linear Guideway Assembly and Calibration

“…Huang et al [16] utilized a method for measuring 5-DOF errors of a moving stage with a monolithic prism and three PSDs. Yan et al [17] proposed a laser straightness interferometer system that is able to compensate the rotational error and simultaneously detect the 6-DOF error of a linear stage by using one PSD, two QDs, one Wollaston prism, one corner cube, and other optical components.…”

“…Therefore, two methods are proposed in this study for calibrating the above altitude angle: The first method is designed for ease of use based on Michelson principle using a laser interferometer as the light receiver, and the second one is aimed for high calibration repeatability based on autocollimator principle using QD to replace the light receiver. The literature mentioned above (e.g., Ni et al [7], Fan et al [11], Huang et al [16], and Yan et al [17]) proposed an MDFM system for single axis motion, respectively. However, these systems were composed with large numbers of optical lenses or optical components, which were difficult to setup and use in fabrication site of the factory.…”

Correlation-coefficient Based Ring-filtering Method for Centering a Non-diffracting Fringe Image

“…This method has high sensitivity and precision, but only is used for measuring one dimension, can't be interrupted in measuring process, and the laser device need with high stability [1,2]. Diffraction method (such as Zone and phase plate) can avoid the asymmetrical distribution, but still has many defects, for example, the focus error will be happened in focusing process due to imaging position of diffraction crosshair is discontinuous, and diffraction crosshair is deformation and fuzzy, which caused by error of wavefront, so alignment accuracy is affected by this factor [3,4], certainly, including air turbulence.…”