2018
DOI: 10.3390/electronics7120377
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A Comprehensive Review of Recent Progress on GaN High Electron Mobility Transistors: Devices, Fabrication and Reliability

Abstract: GaN based high electron mobility transistors (HEMTs) have demonstrated extraordinary features in the applications of high power and high frequency devices. In this paper, we review recent progress in AlGaN/GaN HEMTs, including the following sections. First, challenges in device fabrication and optimizations will be discussed. Then, the latest progress in device fabrication technologies will be presented. Finally, some promising device structures from simulation studies will be discussed.

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Cited by 127 publications
(65 citation statements)
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“…GaN‐high electron mobility transistor (HEMT) is an optimal device for designing microwave high‐power circuits . It is mainly due to the outstanding properties of GaN material such as wide band gap, high electron mobility, high thermal conductivity, and high electron velocity.…”
Section: Introductionmentioning
confidence: 99%
“…GaN‐high electron mobility transistor (HEMT) is an optimal device for designing microwave high‐power circuits . It is mainly due to the outstanding properties of GaN material such as wide band gap, high electron mobility, high thermal conductivity, and high electron velocity.…”
Section: Introductionmentioning
confidence: 99%
“…Gallium nitride (GaN)-based high electron mobility transistor (HEMT) has become an attractive candidate for high power applications, due to integrating lots of outstanding physical properties like high breakdown voltage, high frequency application and low on-resistance [1][2][3]. For power devices, the property of high breakdown voltage is particularly significant.…”
Section: Introductionmentioning
confidence: 99%
“…As CMOS scaling is approaching the fundamental physical limits, a wide range of new nanoelectronic materials and devices have been proposed and explored to extend and/or replace the current electronic devices and circuits so as to maintain progress in speed and integration density [1]. The major issues, including low carrier mobility, degraded subthreshold slope, and heat dissipation, have become worse as the size of the silicon-based metal oxide semiconductor field effect transistors (MOSFETs) decreased to nanometers while the device integration density increased.…”
Section: Introductionmentioning
confidence: 99%