2009
DOI: 10.1002/ppap.200931805
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A Comparative Study on the Photocatalytic and Gas Sensing Properties of Pure and N‐doped TiO2 thin Films

Abstract: A correlation between the photocatalytic efficiency and gas sensitivity has been attempted on pure and N‐doped TiO2 thin films prepared by pulsed DC magnetron sputtering. The physical properties are studied. The gas sensing behavior in pure and nitrogen doped TiO2 thin films could be realized at low temperature. The measurements start at 130 °C. The nitrogen doped TiO2 (3 sccm) has no sensitivity for oxygen. All sensors have sensitivity to hydrogen. If the temperature is increased the sensitivity is increased.… Show more

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Cited by 8 publications
(1 citation statement)
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“…A gas sensor area of about 3.5 mm 2 on the silicon wafer was heated using a small platinum heater. The measurement setup is described in detail elsewhere [14]. Sensitivity to ethanol was determined in a computer controlled measurement setup described in [15].…”
Section: Methodsmentioning
confidence: 99%
“…A gas sensor area of about 3.5 mm 2 on the silicon wafer was heated using a small platinum heater. The measurement setup is described in detail elsewhere [14]. Sensitivity to ethanol was determined in a computer controlled measurement setup described in [15].…”
Section: Methodsmentioning
confidence: 99%