A CMOS multiparameter biochemical microsensor with temperature control and signal interfacing

Recent trends in potentiometric sensor arrays—A review

“…To achieve high dielectric and chemical quality these inorganic materials require high temperature processing and for this reason they cannot be deposited in a CMOS technology as post-processing steps when aluminum connections are already present in a wafer. Modification of processing steps of the standard CMOS enables the integration of conditioning circuits next to sensors [35,37,38] but makes the fabrication expensive and hardly can benefit from mass production in a commercial foundry. ISFET sensors fabricated using unmodified CMOS process [39,40] often show lower pH-sensitivity and higher drift in comparison with NMOS devices.…”

Electronic Mosquito: designing a semi-invasive Microsystem for blood sampling, analysis and drug delivery applications

“…The amperometric glucose microsensor includes two active electrodes and a reference electrode. This electrode configuration is typically used for the implementation of Ion-Sensitive Field Emission Transistor (ISFET) microsensors (Lauwers et al 2001). …”

Modeling ISFET microsensor and ISFET-based microsystems: a review

“…Initially developed for pH detection, ISFETs were also proposed and used for biomedical, agriculture, environmental, food industry, and general analytical applications [26][27][28][29][30][31][32][33][34][35][36][37]. In particular, the compatibility with standard microelectronic fabrication processes, and the possibility of developing intelligent ISFET-based microsystems, by integrating on the same chip the sensors together with the related electronic circuitry for signal conditioning and amplification, were also investigated [38][39][40]. Nowadays, ISFETs are commercially available from several companies (e.g.…”