2014 IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM) 2014
DOI: 10.1109/bctm.2014.6981293
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A 90nm SiGe BiCMOS technology for mm-wave and high-performance analog applications

Abstract: We present the electrical characteristics of the first 90nm SiGe BiCMOS technology developed for production in IBM's large volume 200mm fabrication line. The technology features 300 GHz f T and 360 GHz f MAX high performance SiGe HBTs, 135 GHz f T and 2.5V BV CEO medium breakdown SiGe HBTs, 90nm Low Power RF CMOS, and a full suite of passive devices. A design kit supports custom and analog designs and a library of digital functions aids logic and memory design. The technology supports mm-wave and high-performa… Show more

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Cited by 73 publications
(27 citation statements)
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“…BiCMOS technology is intrinsically an example of integration, since it combines bipolar and field-effect transistors on the same substrate. The technology nodes typically used at mm-wave range from 250 nm with f T around 220 GHz [46], down to 90 nm with f T of 300 GHz [47]. BiCMOS can be used for analogue Intermediate Frequency (IF) and baseband functions as well, and the CMOS part supports Digital Signal Processing (DSP) functions.…”
Section: B Si and Sige Technologiesmentioning
confidence: 99%
See 1 more Smart Citation
“…BiCMOS technology is intrinsically an example of integration, since it combines bipolar and field-effect transistors on the same substrate. The technology nodes typically used at mm-wave range from 250 nm with f T around 220 GHz [46], down to 90 nm with f T of 300 GHz [47]. BiCMOS can be used for analogue Intermediate Frequency (IF) and baseband functions as well, and the CMOS part supports Digital Signal Processing (DSP) functions.…”
Section: B Si and Sige Technologiesmentioning
confidence: 99%
“…With up to ten metal levels, the capability of producing very complex circuits is unrivalled. Also, the performance of passive elements in terms of losses or quality factor is quite competitive [47]. The cost advantage however becomes clear only for mass produced parts, since the initial costs are much higher than in III-V technologies.…”
Section: B Si and Sige Technologiesmentioning
confidence: 99%
“…There are continued efforts to increase the high-speed capabilities of SiGe heterojunction bipolar transistors (HBTs) and to integrate these devices in BiCMOS processes [1], [2]. These developments aim at new applications in the 0.1 to 1THz range but also at enhanced design robustness and power efficiency for operation frequencies below 0.1 THz [3], [4].…”
Section: Introductionmentioning
confidence: 99%
“…Extremely fast complimentary devices capable of being integrated with CMOS open the doorway to complementary bipolar logic and several circuit design opportunities in high-speed memory and logic design. The device operates at a collector current 100 times lower than vertical HBTs [9], thereby addressing concerns about power consumption.…”
Section: Discussionmentioning
confidence: 99%
“…11. The total collector current of these devices is two orders of magnitude lower than the latest vertical HBTs [9], translating to roughly 100 times reduction in power consumption at over twice the speed.…”
Section: Lateral Heterojunction and Partially Depleted Basementioning
confidence: 99%