A 6-DOF Measurement Solution for Permanent Magnet Synchronous Planar Motors Based on Motion Continuity Principle

Chen, Longmin; Hu, Jinchun; Zhu, Yu; Du, Shengwu; Chai, Yuze

doi:10.1109/tim.2015.2509218

Cited by 14 publications

(2 citation statements)

References 19 publications

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“…A total of four pairs of d–q axis current commands are generated for six-degree-of-freedom motion control (levitation, rotation, tilt, translation). That is, an algorithm was implemented to generate 4 d–q axis current commands by combining 16 current commands to generate 8 current commands for generating a total of 8 forces of the 6-DOF magnetic levitation system [ 13 ]. Figure 14 d shows the internal variables of the current controller composed of the vector controller in Figure 14 a.…”

Section: Control Simulation Of 6-dof Magnetic Levitation Systemmentioning

confidence: 99%

A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors

Jung

Lim

2023

Sensors

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Recently, due to the development of semiconductor technology, high-performance memory and digital convergence technology that integrates and implements various functions into one semiconductor chip has been regarded as the next-generation core technology. In the semiconductor manufacturing process, various motors are being applied for automated processes and high product reliability. However, dust and shaft loss due to mechanical friction of a general motor system composed of motor-bearing are problematic for semiconductor wafer processing. In addition, in the edge bread remove (EBR) process after the photoresist application process, a nozzle position control system for removing unnecessary portions of the wafer edge is absolutely necessary. Therefore, in this paper, in order to solve the problems occurring in the semiconductor process, a six-degrees-of-freedom (6-DOF) magnetic levitation system without shaft and bearing was designed for application to the semiconductor process system; and an integrated driving control algorithm for 6-DOF control (levitation, rotation, tilt (Roll–Pitch), X–Y axis movement) using the force of each current component derived through current vector control was proposed. Finally, the 6-DOF magnetic levitation system with the non-contact position sensors was fabricated and the validity of the 6-DOF magnetic levitation control method proposed in this paper was verified through a performance test using a prototype.

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Section: Control Simulation Of 6-dof Magnetic Levitation Systemmentioning

confidence: 99%

A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors

Jung

Lim

2023

Sensors

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“…Vector measurements of field distributions are crucial for geomagnetism and space applications [1], [2]. Spatial field distributions emanating from magnetic structures (for example, Halbach arrays [3]) are highly significant and can be resolved using a positioning stage and a calibrated vector magnetometer. Similarly, tri-axial coil systems can be characterized in terms of their homogeneity and angularity using a traceable vector magnetometer.…”

Section: Introductionmentioning

confidence: 99%

Orientation of a Vector Magnetometer Optically Referenced to an External Coordinate System

et al. 2020

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We present a new method to realize a vector magnetometer that has been optically referenced to an external coordinate system. The vector magnetometer is made up of three Hall sensors attached to orthogonal faces of a glass cube. When placed in a homogeneous magnetic field, rotating the vector magnetometer around two axes allows the orientation of each sensor to be determined with respect to the glass cube. The orientation of the glass cube is detected by an autocollimator and optically referenced to an external coordinate system. A direction uncertainty below 130 µrad (which is traceable to angle standards) is achieved.

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A Novel Inductive Sensor For Simultaneous Linear and Angular Displacement Measurement

Emany,

Kumar,

Vijayakumar

et al. 2024

2024 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)

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A 6-DOF Measurement Solution for Permanent Magnet Synchronous Planar Motors Based on Motion Continuity Principle

Cited by 14 publications

References 19 publications

A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors

A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors

Orientation of a Vector Magnetometer Optically Referenced to an External Coordinate System

A Novel Inductive Sensor For Simultaneous Linear and Angular Displacement Measurement

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