A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors

Jung, Dong-Hoon; Lim, Jong Suk

doi:10.3390/s23020905

Cited by 2 publications

(1 citation statement)

References 13 publications

(10 reference statements)

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“…Magnetic levitation technology has garnered significant interest in various applications, including chip manufacturing [1][2][3][4], microscopic imaging [5][6][7][8], and force control [9][10][11][12]. Its advantages of being friction-less [13], non-polluting [14], and having high precision capabilities [15] make it highly desirable. Presently, multiple processing methods, such as extreme ultraviolet lithography [16][17][18], require workbenches to carry workpieces between several stations.…”

Section: Introductionmentioning

confidence: 99%

Force and Torque Model of Magnetically Levitated System with 2D Halbach Array and Printed Circuit Board Coils

Zou,

Song,

Zhou

et al. 2023

Sensors

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Precision machining fields often require worktables with different stroke sizes. To address the need for scalability and facilitate manufacturing, this study proposes a novel infinite expansion magnetically levitated planar motor (MLPM) based on PCB stator coils. Different from existing magnetic levitation systems that use PCB coils, the design presented in this paper utilizes smaller coil units, with each coil being independent of one another. The coils are structured in a spiral pattern on a 16-layer PCB, comprising 15 layers of coils, while the last layer is dedicated to wiring and other circuits. Magnetic field modeling is conducted for both the stator coil and the 2D Halbach array structure employed in the system. A simple table lookup method is employed to accurately account for the prevalent end effects observed during system motion. Additionally, the decoupling effect of magnetic force and torque is evaluated by solving for the current vector at different points along a specific trajectory. To verify the accuracy of the proposed system’s modeling, a prototype is developed and tested. Experimental results demonstrate that compared to traditional harmonic model methods, the proposed approach improves the calculation accuracy of magnetic force by 50.31% and torque by 70.65%. This study presents a new MLPM system with vast potential applications in precision manufacturing and robotics. The innovative design and improved performance characteristics make it a promising technology for enhancing the capabilities of worktables in precision machining fields.

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