A Long-Range 6-DOF Absolute Displacement Sensor for Magnetic Levitation Stage Based on the Coding Principle

Zhang, Zhen; Cao, Bingzhang; Wang, Lei; Sun, Hongwei; Liu, Peijun

doi:10.1109/jsen.2024.3425864

IEEE Sensors J.

2024

DOI: 10.1109/jsen.2024.3425864

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A Long-Range 6-DOF Absolute Displacement Sensor for Magnetic Levitation Stage Based on the Coding Principle

Zhen Zhang,

Bingzhang Cao,

Lei Wang

et al.

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A Long-Range 6-DOF Absolute Displacement Sensor for Magnetic Levitation Stage Based on the Coding Principle

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References 33 publications

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