A 2$\,\times\,$2 Mechanical Optical Switch With a Thin MEMS Mirror

Fan, Kuang‐Chao; Lin, Wei-Hsun; Chiang, Li-Hung; Chen, Shou-Heng; Chung, Tien-Tung; Yang, Yao‐Joe

doi:10.1109/jlt.2008.928955

Cited by 17 publications

(7 citation statements)

References 35 publications

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“…A thin membrane MEMS mirror provides several advantages such as low cost, low voltage operation, and high compatibility for large-area configuration due to its low weight [ 11 , 12 ]. In particular, an electrothermal actuator incorporating a thin membrane as well as thin bimorph structures is highly favorable for fast heat dissipation [ 13 , 14 ] and large actuation ranges [ 15 ].…”

Section: Introductionmentioning

confidence: 99%

Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

2021

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A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation. However, the ultrathin mirror is significantly vulnerable to diverse film deformation due to residual thin film stresses, so that high flatness of the mirror is hardly achieved. Here, we report a MEMS mirror of large-area and ultrathin membrane with high flatness by using the silicon rim microstructure (SRM). The ultrathin MEMS mirror with SRM (SRM-mirror) consists of aluminum (Al) deposited silicon nitride membrane, bimorph actuator, and the SRM. The SRM is simply fabricated underneath the silicon nitride membrane, and thus effectively inhibits the tensile stress relaxation of the membrane. As a result, the membrane has high flatness of 10.6 m−1 film curvature at minimum without any deformation. The electrothermal actuation of the SRM-mirror shows large tilting angles from 15° to −45° depending on the applied DC voltage of 0~4 VDC, preserving high flatness of the tilting membrane. This stable and statically actuated SRM-mirror spurs diverse micro-optic applications such as optical sensing, beam alignment, or optical switching.

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Section: Introductionmentioning

confidence: 99%

Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

2021

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“…Micromirrors and microscanners are key technologies for numerous optical applications, including laser projection [1], optical communication [2], displays [3][4][5][6][7], medical imaging [8,9], and light detection and ranging (LiDAR) [10][11][12][13]. This widest range of varying applications is down to their superior production costs, compact dimensions, and energy efficiency.…”

Section: Introductionmentioning

confidence: 99%

System-Level Modelling and Simulation of a Multiphysical Kick and Catch Actuator System

2021

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This paper presents a system-level model of a microsystem architecture deploying cooperating microactuators. An assembly of a piezoelectric kick-actuator and an electromagnetic catch-actuator manipulates a structurally unconnected, magnetized micromirror. The absence of mechanical connections allows for large deflections and multistability. Closed-loop feedback control allows this setup to achieve high accuracy, but requires fast and precise system-level models of each component. Such models can be generated directly from large-scale finite element (FE) models via mathematical methods of model order reduction (MOR). A special challenge lies in reducing a nonlinear multiphysical FE model of a piezoelectric kick-actuator and its mechanical contact to a micromirror, which is modeled as a rigid body. We propose to separate the actuator–micromirror system into two single-body systems. This step allows us to apply the contact-induced forces as inputs to each sub-system and, thus, avoid the nonlinear FE model. Rather, we have the linear model with nonlinear input, to which established linear MOR methods can be applied. Comparisons between the reference FE model and the reduced order model demonstrate the feasibility of the proposed methodology. Finally, a system-level simulation of the whole assembly, including two actuators, a micromirror and a simple control circuitry, is presented.

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“…Furthermore, MEMS scanners can easily perform two-dimensional (2D) scans, which is one of the most important advantages over conventional macroscanners [ 2 ]. Such advantages have promoted the use of MEMS scanners in a variety of applications such as optical communications [ 3 ], displays [ 1 , 4 , 5 ], biomedical imaging [ 6 ], and light detection and ranging (LiDAR) [ 7 , 8 ].…”

Section: Introductionmentioning

confidence: 99%

Gimbal-Less Two-Axis Electromagnetic Microscanner with Twist Mechanism

et al. 2018

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We present an electromagnetically driven microscanner based on a gimbal-less twist mechanism. In contrast to conventional microscanners using a gimbal-less leverage mechanism, our device utilizes a gimbal-less twist mechanism to increase the scan angle in optical applications requiring a large scanning mirror. The proposed gimbal-less scanner with twist mechanism increases the scan angle by 1.55 and 1.97 times for the slow and fast axes, respectively, under the same force; 3.64 and 1.97 times for the slow and fast axes, respectively, under the same maximum stress, compared to the gimbal-less leverage mechanism. The scanner with a 3-mm-diameter mirror and a current path composed of a single-turn coil was fabricated, and it showed the maximum scan angle of 5° (quasi-static) and 22° (resonant) for the slow and fast axes, respectively. The experimentally estimated crosstalk was as small as 0.47% and 0.97% for the fast and slow axes affected by the other axes, respectively, which was determined using a newly employed methodology based on fast Fourier transform.

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A 2$\,\times\,$2 Mechanical Optical Switch With a Thin MEMS Mirror

Cited by 17 publications

References 35 publications

Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

System-Level Modelling and Simulation of a Multiphysical Kick and Catch Actuator System

Gimbal-Less Two-Axis Electromagnetic Microscanner with Twist Mechanism

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