Gimbal-Less Two-Axis Electromagnetic Microscanner with Twist Mechanism

Abstract

We present an electromagnetically driven microscanner based on a gimbal-less twist mechanism. In contrast to conventional microscanners using a gimbal-less leverage mechanism, our device utilizes a gimbal-less twist mechanism to increase the scan angle in optical applications requiring a large scanning mirror. The proposed gimbal-less scanner with twist mechanism increases the scan angle by 1.55 and 1.97 times for the slow and fast axes, respectively, under the same force; 3.64 and 1.97 times for the slow and fast axes, respectively, under the same maximum stress, compared to the gimbal-less leverage mechanism. The scanner with a 3-mm-diameter mirror and a current path composed of a single-turn coil was fabricated, and it showed the maximum scan angle of 5° (quasi-static) and 22° (resonant) for the slow and fast axes, respectively. The experimentally estimated crosstalk was as small as 0.47% and 0.97% for the fast and slow axes affected by the other axes, respectively, which was determined using a newly employed methodology based on fast Fourier transform.

Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components

“…Numerous microscanners that are based on the comb-drive technology have been developed [23,24]. In our case, the design, fabrication, and characterization of the x-y scanner are detailed in Ref.…”

Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

“…resonant scanning type avoid this shortcoming and can result in raster scanning patterns [13]. In addition, their resonant axis has a larger scanning angle, compared to double nonresonant scanning.…”

“…Hofmann et al proposed a 0.8 mm scanner with resonant angle of ±21.5 • [12]. Scanners of one resonant and one non-resonant scanning type avoid this shortcoming and can result in raster scanning patterns [13]. In Micromachines 2021, 12, 378 2 of 14 addition, their resonant axis has a larger scanning angle, compared to double non-resonant scanning.…”

System-Level Modelling and Simulation of a Multiphysical Kick and Catch Actuator System

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