System-Level Modelling and Simulation of a Multiphysical Kick and Catch Actuator System

Abstract

This paper presents a system-level model of a microsystem architecture deploying cooperating microactuators. An assembly of a piezoelectric kick-actuator and an electromagnetic catch-actuator manipulates a structurally unconnected, magnetized micromirror. The absence of mechanical connections allows for large deflections and multistability. Closed-loop feedback control allows this setup to achieve high accuracy, but requires fast and precise system-level models of each component. Such models can be generated directly from large-scale finite element (FE) models via mathematical methods of model order reduction (MOR). A special challenge lies in reducing a nonlinear multiphysical FE model of a piezoelectric kick-actuator and its mechanical contact to a micromirror, which is modeled as a rigid body. We propose to separate the actuator–micromirror system into two single-body systems. This step allows us to apply the contact-induced forces as inputs to each sub-system and, thus, avoid the nonlinear FE model. Rather, we have the linear model with nonlinear input, to which established linear MOR methods can be applied. Comparisons between the reference FE model and the reduced order model demonstrate the feasibility of the proposed methodology. Finally, a system-level simulation of the whole assembly, including two actuators, a micromirror and a simple control circuitry, is presented.

Model Order Reduction of Microactuators: Theory and Application

“…This class of methods has been deployed in numerous MEMS-related research articles, especially due to its synergy with high-dimensional FEM models. Examples include simple microstructures [43], electro-thermal MEMS [44][45][46][47][48], thermomechanical microgrippers [27], piezoelectric devices [49][50][51], electromechanical actuators [52], electromagnetic systems [53,54], gyroscopes [55] and accelerometers [56].…”

Thermal-Mechanical Analysis of a Power Module with Parametric Model Order Reduction

“…Scognamillo et al [21] exercised a MOR code, FANTASTIC, to evaluate the nonlinear thermal activities of a coupled electrothermal PEM model. A multiphysical ROM of a piezoelectric actuator considering nonlinear inputs was achieved, through Krylov subspace-based MOR method, by Sch¨ utz et al [22]. In a recent investigation [23], the temperature-dependent coefficient of thermal expansion (CTE) of the wire material of a PEM has been parametrised in direct coupled thermal-mechanical parametric reduced order modelling.…”

Thermal-Mechanical Analysis of a Power Module with Parametric Model Order Reduction

“…Scognamillo et al [21] exercised a MOR code, FANTASTIC, to evaluate the nonlinear thermal activities of a coupled electrothermal PEM model. A multiphysical ROM of a piezoelectric actuator considering nonlinear inputs was achieved, through Krylov subspace-based MOR method, by Schütz et al [22]. In a recent investigation [23], the temperature-dependent coefficient of thermal expansion (CTE) of the wire material of a PEM has been parametrised in direct coupled thermal-mechanical parametric reduced order modelling.…”