2010
DOI: 10.1109/jssc.2010.2051475
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A 0.13 $\mu{\hbox {m}}$ SiGe BiCMOS Technology Featuring f$_{T} $/f$_{\max}$ of 240/330 GHz and Gate Delays Below 3 ps

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Cited by 142 publications
(39 citation statements)
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“…The VCO is fabricated in IHP's SiGe BiCMOS technology SG13S [3]. This process offers heterojunction bipolar transistors (HBT) with a minimum effective emitter width of 130 nm, 250 GHz transit frequency (f T ) and 300 GHz maximum oscillation frequency (f max ).…”
Section: Circuit Designmentioning
confidence: 99%
“…The VCO is fabricated in IHP's SiGe BiCMOS technology SG13S [3]. This process offers heterojunction bipolar transistors (HBT) with a minimum effective emitter width of 130 nm, 250 GHz transit frequency (f T ) and 300 GHz maximum oscillation frequency (f max ).…”
Section: Circuit Designmentioning
confidence: 99%
“…1. A recent version of this HBT module is implemented in our 0.13µm BiCMOS technology corresponding to the initial DOTFIVE generation D51 (10). The HBT development of this work is performed in our 0.25µm SG25H1 BiCMOS technology (11) environment, including shallow trench isolation, a deeptrench-free implanted collector well, a poly-resistor, 5 metal layers, and a 1fF/µm 2 MIM capacitor.…”
Section: Device Fabricationmentioning
confidence: 99%
“…With the rapid advancement of HBT technology and high f t and f max , it has become possible to build fundamental millimeter wave sources in Silicon Germanium (SiGe) technology [1]. Recently, fundamental mode voltage controlled oscillators (VCOs) operating up to 181 GHz [2], 186 GHz [3], and 245 GHz [4] have been reported in SiGe BiCMOS technology. Moreover, VCO circuits can be used as benchmark to test and compare technologies in terms of speed and noise performance.…”
Section: Introductionmentioning
confidence: 99%