2010 International Electron Devices Meeting 2010
DOI: 10.1109/iedm.2010.5703452
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SiGe HBT technology with f<inf>T</inf>/f<inf>max</inf> of 300GHz/500GHz and 2.0 ps CML gate delay

Abstract: A SiGe HBT technology featuring f T /f max /BV CEO =300GHz/ 500GHz/1.6V and a minimum CML ring oscillator gate delay of 2.0 ps is presented. The speed-improvement compared to our previous SiGe HBT generations originates from lateral device scaling, a reduced thermal budget, and changes of the emitter and base composition, of the salicide resistance as well as of the low-doped collector formation.

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Cited by 134 publications
(86 citation statements)
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“…The first SiGe HBT technology with 500 GHz operating frequency and a gate delay of 1.9 ps at room temperature [1] was developed within the DOTFIVE project [2]. The follow up project DOTSEVEN is targeting the development of SiGe:C HBT technologies with cut off frequencies f max of around 700 GHz.…”
mentioning
confidence: 99%
“…The first SiGe HBT technology with 500 GHz operating frequency and a gate delay of 1.9 ps at room temperature [1] was developed within the DOTFIVE project [2]. The follow up project DOTSEVEN is targeting the development of SiGe:C HBT technologies with cut off frequencies f max of around 700 GHz.…”
mentioning
confidence: 99%
“…The circuit was fabricated in IHP 130-nm SiGe HBT technology [1]. A chip photo of the fabricated detector is shown in Fig.…”
Section: Measurement Resultsmentioning
confidence: 99%
“…The continuous scaling and material innovations in the semiconductor technologies in recent decades have led to transistors with f max up to 500 GHz [1] and beyond 1 THz [2,3] based on Si and III-V semiconductors, respectively. This improved speed has triggered device application at increasingly high frequency bands, penetrating into the THz band (300 GHz to 3 THz).…”
Section: Introductionmentioning
confidence: 99%
“…For a heterodyne system, two circuit components are indispensable: oscillator and mixer. In this paper, we report an oscillator and a mixer that can be readily adopted for heterodyne systems operating near 140 GHz, both designed and fabricated based on IHP 0.13-mm SiGe HBT technology [6].…”
Section: Introductionmentioning
confidence: 99%