“…Two Si(Li) devices were fabricated using Pell's method at the Unite de Developpment de la Technologie du Silicium in Algeria [7]. These devices exhibited excellent current-voltage (I-V), capacitance-voltage (C-V) and charge collection efficiency (CCE) properties after fabrication in 2003.…”
“…Two Si(Li) devices were fabricated using Pell's method at the Unite de Developpment de la Technologie du Silicium in Algeria [7]. These devices exhibited excellent current-voltage (I-V), capacitance-voltage (C-V) and charge collection efficiency (CCE) properties after fabrication in 2003.…”
“…And for clinical applications, adhesive strength should be high enough to ensure a long-term stable attachment of HA coatings to substrates in vivo, which can be attained by introducing intermediate layers, such as microarc TiO 2 and anodic Al 2 O 3 , between HA coating and substrate [11,12]. It is also interesting that aluminum films and their derived anodic Al 2 O 3 films have found successful applications in silicon-based biosensors due to their good conductivity and dielectric performances, respectively [13][14][15][16]. Furthermore, anodic Al 2 O 3 can serve as protective coatings for substrates due to their excellent ability of anti-corrosion.…”
A novel composite biocoating of hydroxyapatite(HA)/Al2O3has been successfully prepared on Si(100) substrate by a hybrid technique of physical vapor deposition (PVD), anodization, and electrodeposition. The fabricated composite biocoating was also annealed under temperatures ranging from 573 to 973 K. Scanning electron microscope (SEM), energy dispersive spectrometry (EDS), and X-ray diffraction (XRD) were employed to investigate morphologies and compositions of the HA/Al2O3composite biocoating. It is found that Ca-deficient hydroxyapatite (CDHA) coating holding a Ca/P atomic ratio of 1.61 has been directly electrodeposited onto porous anodic Al2O3with 1.5~3 μm pore diameter formed by anodization of PVD-deposited aluminum layer on Si(100) and subsequent pore-widening. The embedding of HA outer coating into porous anodic Al2O3results in a sandwich-like structure in the finally obtained HA/Al2O3composite biocoating on Si(100). XRD results indicate the decomposition of HA into β-TCP at an annealing temperature above 873 K.
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