2000
DOI: 10.1023/a:1011314420080
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Cited by 81 publications
(61 citation statements)
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“…3. The increase in surface roughness of siloxane films due to particulate formation in atmospheric plasma discharges has previously been observed [33,36]. The line scan comparison in Fig.…”
Section: Surface Analysissupporting
confidence: 57%
“…3. The increase in surface roughness of siloxane films due to particulate formation in atmospheric plasma discharges has previously been observed [33,36]. The line scan comparison in Fig.…”
Section: Surface Analysissupporting
confidence: 57%
“…Simple hydrocarbons and fluorocarbons were used to deposit plasma polymers or carbonlike films. Nowadays, an assortment of deposition precursors is known from that a broad variety of films can be formed [9][10][11][12][13][14][62][63][64][65][66][67]. With respect to the demands of semiconductor industry, inorganic precursors (e.g.…”
Section: Fields Of Applicationmentioning
confidence: 99%
“…Therefore, hexamethyldisiloxane (HMDSO) and tetraethoxysilane (TEOS) are studied for their utilizability of a BD-based plasma-enhanced chemical vapor deposition well known from low pressure plasma processing, see e.g. [12,13]. One important motivation for this is the corrosion protection of metallic surfaces at atmospheric pressure.…”
Section: Fields Of Applicationmentioning
confidence: 99%
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“…[4] Within the last years, deposition of plasma polymerised films by these sources has been studied as well. [5][6][7][8] However, due to complex 3D-geometries of aircraft structures, atmospheric plasma jet sources need to be employed, where the plasma source can be mounted on a robot. Different jet sources have been investigated for the deposition of silicon-based coatings such as an RF driven jet source [9] or a DC Arc Jet, [10] as well as a commercially available open air plasma jet (PlasmaTreat, Pt), which has already been used for the deposition of corrosion protective films on Al alloys [11,12] and is also known from adhesive bonding in automotive The paper presents investigations on the deposition of plasma polymerised films at atmospheric pressure as a pretreatment for painting and adhesive bonding of aircraft aluminium structures.…”
Section: Introductionmentioning
confidence: 99%