2017 IEEE International Electron Devices Meeting (IEDM) 2017
DOI: 10.1109/iedm.2017.8268315
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8-Layers 3D vertical RRAM with excellent scalability towards storage class memory applications

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Cited by 87 publications
(52 citation statements)
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“…The layer-independence of μ_Log(LRS) and σ_Log(LRS) agrees well with results in [6]. At LRS, the current is dominated by Poole-Frenkel emission which gives rise to the relation in (1) [6] ln…”
supporting
confidence: 81%
See 1 more Smart Citation
“…The layer-independence of μ_Log(LRS) and σ_Log(LRS) agrees well with results in [6]. At LRS, the current is dominated by Poole-Frenkel emission which gives rise to the relation in (1) [6] ln…”
supporting
confidence: 81%
“…Devices and experiments: Fig. 1a depicts the architecture of the 3D VRRAM crossbar used in this work, with the detailed fabrication flow in [6]. A single crossbar consists of 32*8*8 = 2048 devices.…”
mentioning
confidence: 99%
“…[78,147] Among these candidates for artificial synapses, RRAM devices appear to be the most attractive option because of the low energy consumption down to sub-pJ per synaptic event, the extreme scalability as crossbar RRAM can have an area of down to 2 × 2 nm 2 , the potential for high-density integration with selector and 3D stacking, [148,149] as well as excellent CMOS fabrication compatibility. Different levels of stable conductance can be obtained through carefully adjusting the pulse amplitude or width to realize gradual SET programing.…”
Section: Memory Switching In Artificial Synapsesmentioning
confidence: 99%
“…Variability can happen from cycle-to-cycle (intra-device) and from device-to-device (inter-device). The variability of the resistance states R ON and R OF F across a matrix is largely influenced by the choice of the stack's materials (e.g., single material HfO X vs. bilayer HfO X +TaO X ) [91], [92], as well as the device scaling. Extreme scaling seems to reduce the variability, probably because of a reduction of the area where the switching occurs [93].…”
Section: Device-to-device and Programming Variabilitymentioning
confidence: 99%