“…Physisorbed molecular films are widely used as model systems to understand fundamental molecule−surface chemistry, to study interphase phenomena in systems of reduced dimension and dimensionality, and to explore the interplay between molecule−surface and molecule−molecule interactions. − In practice, they can also provide valuable insight into diverse applications such as lubricating films − and reactive precursor films. ,, The structural characteristics of these films, the mechanisms of thin-film growth, and the phase diagrams for these systems provide information that is required to optimize the adhesive properties of films, to ensure uniform “wetting” of the substrate, and to rationally design the film constituents for a given application. We are currently interested in using thin adsorbed films of metal−carbonyls [e.g., Fe(CO) 5 , Ni(CO) 4 ] as precursors for electron-induced metallization processes; the precursor materials of interest are principally organometallics, because of the experimental ease with which these target species can be vapor-deposited, − and subsequently dissociated using electron beams. ,,, The structural properties of these as-deposited multilayer films have important consequences for the success of this strategy, and the determination of the film properties using nondestructive probes has become increasingly important in this regard.…”