In this paper, we describe the properties of flexible plastic substrates with a transparent conducting electrode (TCE), which are important for organic lightemitting devices (OLEDs). Specifically, we have evaluated the TCE electrical resistivity, surface roughness, electrode patterning, optical transmission, and the substrate water vapor/oxygen transmission. We have studied the effect of ultraviolet (UV)-ozone treatment on the TCE surface by using contact angle measurements and x-ray photoelectron spectroscopy (XPS). A decrease in the advancing contact angle by 30-40°and an increase of oxygen content on the TCE surface by 10 at.% were observed after the UV-ozone treatment. These changes facilitate the polymer adhesion to the TCE surface and increase the TCE surface work function, respectively. A sheet resistance of 12-13 Ω/I I, an optical transmission greater than 80% over the visible range, and a surface roughness of 1.4-2.2-nm RMS over 50 ϫ 50 µm 2 have been obtained for the plastic substrates. These properties are adequate for OLED applications based on United States Display Consortium specifications. Finally, we have found that a combination of hydrogenated amorphous silicon-nitride and siliconoxide layers deposited on one side of the substrate at low-temperature reduces the water vapor and oxygen transmission rates (TRs) to less than 10 Ϫ5 g/cm 2 -day-atm and about 10 Ϫ7 cc/cm 2 -day-atm, respectively.